Issued Patents All Time
Showing 26–50 of 102 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10474045 | Lithographic apparatus and device manufacturing method | Franciscus Godefridus Casper Bijnen, Arie Jeffrey Den Boef, Richard Johannes Franciscus Van Haren, Alexander Ypma, Irina Lyulina +6 more | 2019-11-12 |
| 10466601 | Alignment sensor for lithographic apparatus | Alessandro Polo, Simon Gijsbert Josephus Mathijssen, Scott Coston, Ronan James Havelin | 2019-11-05 |
| 10386735 | Lithographic apparatus alignment sensor and method | Simon Gijsbert Josephus Mathijssen, Arie Jeffrey Den Boef, Nitesh Pandey, Stefan Michiel Witte, Kjeld Sijbrand Eduard Eikema | 2019-08-20 |
| 10346729 | Apparatus and method for converting a vector-based representation of a desired device pattern for a lithography apparatus, apparatus and method for providing data to a programmable patterning device, a lithography apparatus and a device manufacturing method | Marcel Bontekoe, Patrick Petrus Albertus Arnoldino Peeters | 2019-07-09 |
| 10331040 | Method of controlling a lithographic apparatus and device manufacturing method, control system for a lithographic apparatus and lithographic apparatus | Edo Maria Hulsebos, Ralph Brinkhof, Pieter Jacob Heres, Jorn Kjeld Lucas, Loek Johannes Petrus Verhees +2 more | 2019-06-25 |
| 10267744 | Illumination source for an inspection apparatus, inspection apparatus and inspection method | Nan Lin, Sander Bas Roobol, Simon Gijsbert Josephus Mathijssen | 2019-04-23 |
| 10261423 | Lithographic method and apparatus | Lense Hendrik-Jan Maria Swaenen, Johannes Jacobus Matheus Baselmans, Bogathi Vishnu Vardhana Reddy, Beeri Nativ | 2019-04-16 |
| 10254663 | Lithographic apparatus and device manufacturing method involving a heater | Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Van Meer +20 more | 2019-04-09 |
| 10248034 | Lithographic apparatus and device manufacturing method | Christiaan Alexander Hoogendam, Bob Streefkerk, Johannes Catharinus Hubertus Mulkens, Erik Theodorus Maria Bijlaart, Aleksey Yurievich Kolesnychenko +4 more | 2019-04-02 |
| 10248033 | Lithographic apparatus and device manufacturing method | Jeroen Johannes Sophia Maria Mertens, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Antonius Johannus Van Der Net +4 more | 2019-04-02 |
| 10241426 | Lithographic apparatus and device manufacturing method | — | 2019-03-26 |
| 10222703 | Lithographic apparatus and method | Heine Melle Mulder, Johannes Jacobus Matheus Baselmans, Adrianus Franciscus Petrus Engelen, Markus Franciscus Antonius Eurlings, Hendrikus Robertus Marie Van Greevenbroek +2 more | 2019-03-05 |
| 10133192 | Method and apparatus for determining the property of a structure, device manufacturing method | Simon Gijsbert Josephus Mathijssen, Sander Bas Roobol, Nan Lin | 2018-11-20 |
| 10132763 | Inspection method and apparatus, lithographic system and device manufacturing method | Hugo Augustinus Joseph Cramer, Robert John Socha, Jean-Pierre Agnes Henricus Marie Vaessen | 2018-11-20 |
| 9940703 | Method of measuring a property of a target structure, inspection apparatus, lithographic system and device manufacturing method | Murat Bozkurt, Martin Jacobus Johan Jak | 2018-04-10 |
| 9939742 | Method and apparatus for measuring asymmetry of a microstructure, position measuring method, position measuring apparatus, lithographic apparatus and device manufacturing method | Arie Jeffrey Den Boef, Simon Gijsbert Josephus Mathijssen | 2018-04-10 |
| 9927726 | Polarization independent interferometer | Arie Jeffrey Den Boef, Justin Kreuzer, Simon Gijsbert Josephus Mathijssen | 2018-03-27 |
| 9857703 | Alignment sensor and lithographic apparatus | Simon Gijsbert Josephus Mathijssen, Arie Jeffrey Den Boef, Justin Kreuzer | 2018-01-02 |
| 9846368 | Lithographic apparatus and device manufacturing method utilizing data filtering | Johannes Jacobus Matheus Baselmans | 2017-12-19 |
| 9778575 | Lithographic apparatus and method | Heine Melle Mulder, Johannes Jacobus Matheus Baselmans, Adrianus Franciscus Petrus Engelen, Markus Franciscus Antonius Eurlings, Hendrikus Robertus Marie Van Greevenbroek +2 more | 2017-10-03 |
| 9778025 | Method and apparatus for measuring asymmetry of a microstructure, position measuring method, position measuring apparatus, lithographic apparatus and device manufacturing method | Simon Gijsbert Josephus Mathijssen, Erik Willem Bogaart, Arie Jeffrey Den Boef | 2017-10-03 |
| 9753380 | Lithographic apparatus and device manufacturing method | Jeroen Johannes Sophia Maria Mertens, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Antonius Johannus Van Der Net +4 more | 2017-09-05 |
| 9696636 | Lithographic apparatus, device manufacturing method and computer program | Arno Jan Bleeker, Erik Roelof Loopstra | 2017-07-04 |
| 9633427 | Method of measuring a property of a target structure, inspection apparatus, lithographic system and device manufacturing method | Murat Bozkurt, Martin Jacobus Johan Jak | 2017-04-25 |
| 9568831 | Lithographic apparatus and device manufacturing method | Arno Jan Bleeker | 2017-02-14 |