Issued Patents All Time
Showing 76–100 of 102 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8049865 | Lithographic system, device manufacturing method, and mask optimization method | Wouter Frans Willem Mulckhuyse | 2011-11-01 |
| 8009270 | Uniform background radiation in maskless lithography | Paul Antoon Cyriel Desmedt, Minne Cuperus | 2011-08-30 |
| 8004652 | Lithographic apparatus and device manufacturing method | Jeroen Johannes Sophia Maria Mertens, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Antonius Johannus Van Der Net +4 more | 2011-08-23 |
| 7965373 | Lithographic apparatus and device manufacturing method utilizing a datapath having a balanced calculation load | Martinus Hendricus Hoeks | 2011-06-21 |
| 7936445 | Altering pattern data based on measured optical element characteristics | Jason Hintersteiner, Wenceslao A. Cebuhar | 2011-05-03 |
| 7868998 | Lithographic apparatus | Christiaan Alexander Hoogendam, Bob Streefkerk, Johannes Catharinus Hubertus Mulkens, Erik Theodorus Maria Bijlaart, Aleksey Yurievich Kolesnychenko +4 more | 2011-01-11 |
| 7864295 | Lithographic apparatus and device manufacturing method utilizing data filtering | Johannes Jacobus Matheus Baselmans | 2011-01-04 |
| 7830493 | System and method for compensating for radiation induced thermal distortions in a substrate or projection system | Willem Jurrianus Venema, Koen Maria Zaal | 2010-11-09 |
| 7826672 | Lithographic apparatus and device manufacturing method utilizing a multiple dictionary compression method for FPD | Lambertus Gerardus Maria Kessels, Remco Johannes Van Engelen | 2010-11-02 |
| 7804575 | Lithographic apparatus and device manufacturing method having liquid evaporation control | Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Vermeer +20 more | 2010-09-28 |
| 7779781 | Lithographic apparatus and device manufacturing method | Jeroen Johannes Sophia Maria Mertens, Christiaan Alexander Hoogendam, Hans Jansen, Leon Joseph Maria Van Den Schoor, Sjoerd Nicolaas Lambertus Donders +1 more | 2010-08-24 |
| 7751032 | Lithographic apparatus and device manufacturing method | Hans Jansen, Jan-Gerard Cornelis Van Der Toorn | 2010-07-06 |
| 7738077 | Patterning device utilizing sets of stepped mirrors and method of using same | Johannes Jacobus Matheus Baselmans | 2010-06-15 |
| 7606430 | Lithographic apparatus and device manufacturing method utilizing a multiple dictionary compression method for FPD | Lambertus Gerardus Maria Kessels, Remco Johannes Van Engelen | 2009-10-20 |
| 7508220 | Detection assembly and lithographic projection apparatus provided with such a detection assembly | — | 2009-03-24 |
| 7486384 | Lithographic support structure | Edwin Johan Buis, Sjoerd Nicolaas Lambertus Donders, Jan Van Elp, Jan Frederik Hoogkamp, Aschwin Lodewijk Hendricus Johannes Van Meer +8 more | 2009-02-03 |
| 7411653 | Lithographic apparatus | Christiaan Alexander Hoogendam, Bob Streefkerk, Johannes Catharinus Hubertus Mulkens, Erik Theodorus Maria Bijlaart, Aleksey Yurievich Kolesnychenko +4 more | 2008-08-12 |
| 7403261 | Lithographic apparatus and device manufacturing method | Hans Jansen, Jan-Gerard Cornelis Van Der Toorn | 2008-07-22 |
| 7403265 | Lithographic apparatus and device manufacturing method utilizing data filtering | Johannes Jacobus Matheus Baselmans | 2008-07-22 |
| 7379155 | Lithographic apparatus and device manufacturing method | Jeroen Johannes Sophia Maria Mertens, Sjoerd Nicolaas Lambertus Donders, Roelof Frederick De Graaf, Christiaan Alexander Hoogendam, Antonius Johannus Van Der Net +4 more | 2008-05-27 |
| 7317510 | Lithographic apparatus and device manufacturing method | Marcel Bontekoe, Lambertus Gerardus Maria Kessels, Marco Cornelis Jacobus Martinus Van Hassel, Wouter Frans Willem Mulckhuyse | 2008-01-08 |
| 7307695 | Method and device for alignment of a substrate | Johannes Martinus Andreas Hazenberg, Raimond Visser | 2007-12-11 |
| 7304715 | Lithographic apparatus and device manufacturing method | Theodorus Petrus Maria Cadee, Joost Jeroen Ottens, Jeroen Johannes Sophia Maria Mertens, Frederick Eduard De Jong, Koen Goorman +6 more | 2007-12-04 |
| 7251019 | Lithographic apparatus and device manufacturing method utilizing a continuous light beam in combination with pixel grid imaging | Pieter Willem Herman De Jager | 2007-07-31 |
| 7239373 | Lithographic apparatus and device manufacturing method | Johannes Jacobus Matheus Baselmans, Laurentius Catrinus Jorritsma | 2007-07-03 |