| 9547241 |
Alignment sensor, lithographic apparatus and alignment method |
Arie Jeffrey Den Boef, Simon Gijsbert Josephus Mathijssen |
2017-01-17 |
| 9506743 |
Position measuring apparatus, position measuring method, lithographic apparatus and device manufacturing method |
Arie Jeffrey Den Boef, Justin Kreuzer, Simon Gijsbert Josephus Mathijssen, Gerrit Johannes Nijmeijer, J. Christian Swindal +1 more |
2016-11-29 |
| 9494869 |
Lithographic apparatus and device manufacturing method |
Hans Butler, Arno Jan Bleeker, Pieter Renaat Maria Hennus, Martinus Hendricus Hoeks, Sven Antoin Johan Hol +9 more |
2016-11-15 |
| 9488921 |
Lithography apparatus, an apparatus for providing setpoint data, a device manufacturing method, a method of calculating setpoint data and a computer program |
Wouter Frans Willem Mulckhuyse |
2016-11-08 |
| 9482962 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Bob Streefkerk, Johannes Catharinus Hubertus Mulkens, Erik Theodorus Maria Bijlaart, Aleksey Yurievich Kolesnychenko +4 more |
2016-11-01 |
| 9436097 |
Lithographic apparatus and device manufacturing method |
Jeroen Johannes Sophia Maria Mertens, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Antonius Johannus Van Der Net +4 more |
2016-09-06 |
| 9285686 |
Lithographic apparatus involving an immersion liquid supply system with an aperture |
Jeroen Johannes Sophia Maria Mertens, Christiaan Alexander Hoogendam, Hans Jansen, Leon Joseph Maria Van Den Schoor, Sjoerd Nicolaas Lambertus Donders +1 more |
2016-03-15 |
| 9268242 |
Lithographic apparatus and device manufacturing method involving a heater and a temperature sensor |
Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Vermeer +20 more |
2016-02-23 |
| 9250536 |
Lithographic apparatus and method |
Heine Melle Mulder, Johannes Jacobus Matheus Baselmans, Adrianus Franciscus Petrus Engelen, Markus Franciscus Antonius Eurlings, Hendrikus Robertus Marie Greevenbroek +2 more |
2016-02-02 |
| 9188880 |
Lithographic apparatus and device manufacturing method involving a heater |
Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Vermeer +20 more |
2015-11-17 |
| 8937704 |
Lithographic apparatus and device manufacturing method involving a resistivity sensor |
Jeroen Johannes Sophia Maria Mertens, Christiaan Alexander Hoogendam, Hans Jansen, Leon Joseph Maria Van Den Schoor, Sjoerd Nicolaas Lambertus Donders +1 more |
2015-01-20 |
| 8934082 |
Lithographic apparatus and device manufacturing method |
Jeroen Johannes Sophia Maria Mertens, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Antonius Johannus Van Der Net +4 more |
2015-01-13 |
| 8896808 |
Lithographic apparatus and method |
— |
2014-11-25 |
| 8860923 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Bob Streefkerk, Johannes Catharinus Hubertus Mulkens, Erik Theodorus Maria Bijlaart, Aleksey Yurievich Kolesnychenko +4 more |
2014-10-14 |
| 8817235 |
Lithographic apparatus and method involving a pockels cell |
Johannes Jacobus Matheus Baselmans |
2014-08-26 |
| 8717535 |
SLM calibration |
Huibert Visser, Martinus Hendricus Hoeks, Borgert Kruizinga, Bob Streefkerk, Erwin John Van Zwet +4 more |
2014-05-06 |
| 8638418 |
Lithographic apparatus |
Christiaan Alexander Hoogendam, Bob Streefkerk, Johannes Catharinus Hubertus Mulkens, Erik Theodorus Maria Bijlaart, Aleksey Yurievich Kolesnychenko +4 more |
2014-01-28 |
| 8553218 |
Calibration method and apparatus |
Henricus Petrus Maria Pellemans, Gerbrand Van Der Zouw, Willem Marie Julia Marcel Coene |
2013-10-08 |
| 8542344 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Bob Streefkerk, Johannes Catharinus Hubertus Mulkens, Erik Theodorus Maria Bijlaart, Aleksey Yurievich Kolesnychenko +4 more |
2013-09-24 |
| 8542343 |
Lithographic apparatus |
Christiaan Alexander Hoogendam, Bob Streefkerk, Johannes Catharinus Hubertus Mulkens, Erik Theodorus Maria Bijlaart, Aleksey Yurievich Kolesnychenko +4 more |
2013-09-24 |
| 8508715 |
Lithographic apparatus and device manufacturing method utilizing data filtering |
Johannes Jacobus Matheus Baselmans |
2013-08-13 |
| 8259285 |
Lithographic system, device manufacturing method, setpoint data optimization method, and apparatus for producing optimized setpoint data |
Kars Zeger Troost, Jason Hintersteiner, Wenceslao A. Cebuhar, Ronald Peter Albright, Bernardo Kastrup |
2012-09-04 |
| 8233135 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Jan-Gerard Cornelis Van Der Toorn |
2012-07-31 |
| 8142852 |
Lithographic apparatus and device manufacturing method |
Jeroen Johannes Sophia Maria Mertens, Christiaan Alexander Hoogendam, Hans Jansen, Leon Joseph Maria Van Den Schoor, Sjoerd Nicolaas Lambertus Donders +1 more |
2012-03-27 |
| 8089672 |
Array element device control method and apparatus |
Heine Melle Mulder, Marius Ravensbergen, Wilfred Edward Endendijk, Jozef Ferdinand Dymphna Verbeeck |
2012-01-03 |