Issued Patents All Time
Showing 126–150 of 151 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7829145 | Methods of uniformity control for low flow process and chamber to chamber matching | Ganesh Balasubramanian, Tom K. Cho, Daemian Raj | 2010-11-09 |
| 7802538 | Method to deposit functionally graded dielectric films via chemical vapor deposition using viscous precursors | Deenesh Padhi, Sohyun Park, Ganesh Balasubramanian, Li-Qun Xia, Derek R. Witty +1 more | 2010-09-28 |
| 7777197 | Vacuum reaction chamber with x-lamp heater | Amir Al-Bayati, Lester D'Cruz, Alexandros T. Demos, Dale R. DuBois, Khaled A. Elsheref +4 more | 2010-08-17 |
| 7777198 | Apparatus and method for exposing a substrate to a rotating irradiance pattern of UV radiation | Thomas Nowak, Dale R. Du Bois, Sanjeev Baluja, Scott A. Hendrickson, Dustin W. Ho +2 more | 2010-08-17 |
| 7699935 | Method and system for supplying a cleaning gas into a process chamber | Ramprakash Sankarakrishnan, Dale R. DuBois, Ganesh Balasubramanian, Karthik Janakiraman, Thomas Nowak +2 more | 2010-04-20 |
| 7692171 | Apparatus and method for exposing a substrate to UV radiation using asymmetric reflectors | Andrzei Kaszuba, Sanjeev Baluja, Tom K. Cho, Hichem M'Saad, Scott A. Hendrickson +2 more | 2010-04-06 |
| 7663121 | High efficiency UV curing system | Thomas Nowak, Andrzej Kaszuba, Scott A. Hendrickson, Dustin W. Ho, Sanjeev Baluja +3 more | 2010-02-16 |
| 7654224 | Method and apparatus for cleaning a CVD chamber | Maosheng Zhao, Inna Shmurun, Soova Sen, Mao D. Lim, Shankar Venkataraman +1 more | 2010-02-02 |
| 7622005 | Uniformity control for low flow process and chamber to chamber matching | Ganesh Balasubramanian, Tom K. Cho, Daemian Raj | 2009-11-24 |
| 7589336 | Apparatus and method for exposing a substrate to UV radiation while monitoring deterioration of the UV source and reflectors | Andrzei Kaszuba, Thomas Nowak, Sanjeev Baluja, Ndanka O. Mukuti | 2009-09-15 |
| 7572337 | Blocker plate bypass to distribute gases in a chemical vapor deposition system | Ganesh Balasubramanian, Tom K. Cho, Deenesh Padhi, Thomas Nowak, Bok Hoen Kim +2 more | 2009-08-11 |
| 7566891 | Apparatus and method for treating a substrate with UV radiation using primary and secondary reflectors | Thomas Nowak, Dale R. Du Bois, Sanjeev Baluja, Scott A. Hendrickson, Dustin W. Ho +2 more | 2009-07-28 |
| 7554103 | Increased tool utilization/reduction in MWBC for UV curing chamber | Thomas Nowak, Sanjeev Baluja, Andrzej Kaszuba, Ndanka O. Mukuti | 2009-06-30 |
| 7500445 | Method and apparatus for cleaning a CVD chamber | Maosheng Zhao, Inna Shmurun, Soova Sen, Mao D. Lim, Shankar Venkataraman +1 more | 2009-03-10 |
| 7464717 | Method for cleaning a CVD chamber | Maosheng Zhao, Inna Shmurun, Soova Sen, Mao D. Lim, Shankar Venkataraman +1 more | 2008-12-16 |
| 7465357 | Computer-readable medium that contains software for executing a method for cleaning a CVD chamber | Maosheng Zhao, Inna Shmurun, Soova Sen, Mao D. Lim, Shankar Venkataraman +1 more | 2008-12-16 |
| 7410916 | Method of improving initiation layer for low-k dielectric film by digital liquid flow meter | Dustin W. Ho, Alexandros T. Demos, Kelvin Chan, Nagarajan Rajagopalan, Visweswaren Sivaramakrishnan | 2008-08-12 |
| 7259111 | Interface engineering to improve adhesion between low k stacks | Deenesh Padhi, Ganesh Balasubramanian, Annamalai Lakshmanan, Zhenjiang Cui, Bok Hoen Kim +3 more | 2007-08-21 |
| 7189658 | Strengthening the interface between dielectric layers and barrier layers with an oxide layer of varying composition profile | Annamalai Lakshmanan, Deenesh Padhi, Ganesh Balasubramanian, Zhenjiang Cui, Daemian Raj +2 more | 2007-03-13 |
| 7166544 | Method to deposit functionally graded dielectric films via chemical vapor deposition using viscous precursors | Deenesh Padhi, Sohyun Park, Ganesh Balasubramanian, Li-Qun Xia, Derek R. Witty +1 more | 2007-01-23 |
| 6946033 | Heated gas distribution plate for a processing chamber | Lun Tsuei, Soovo Sen, Ju-Hyung Lee, Inna Shmurun, Maosheng Zhao +2 more | 2005-09-20 |
| 6932092 | Method for cleaning plasma enhanced chemical vapor deposition chamber using very high frequency energy | Maosheng Zhao, Shankar Venkataraman | 2005-08-23 |
| 6914014 | Method for curing low dielectric constant film using direct current bias | Lihua Li, Tzu-Fang Huang, Li-Qun Xia, Maosheng Zhao | 2005-07-05 |
| 6797643 | Plasma enhanced CVD low k carbon-doped silicon oxide film deposition using VHF-RF power | Maosheng Zhao, Ying Yu, Shankar Venkataraman, Srinivas D. Nemani, Li-Qun Xia | 2004-09-28 |
| 6709721 | Purge heater design and process development for the improvement of low k film properties | Chen-An Chen, Ellie Yieh, Shankar Venkataraman | 2004-03-23 |