Issued Patents All Time
Showing 1–25 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11348795 | Metal fill process for three-dimensional vertical NAND wordline | Lawrence Schloss, Raashina Humayun, Sanjay Gopinath, Juwen Gao, Michal Danek | 2022-05-31 |
| 11049716 | Gap fill using carbon-based films | Wei Tang, Jason D. Park, Bart J. van Schravendijk, Shu Tsai Wang | 2021-06-29 |
| 10895539 | In-situ chamber clean end point detection systems and methods using computer vision systems | Kapil Sawlani, Gary Lind, Michal Danek, Ronald Powell, Michael Rumer | 2021-01-19 |
| 10438847 | Manganese barrier and adhesion layers for cobalt | Chiukin Steven Lai, Jeong-Seok Na, Raashina Humayun, Michal Danek | 2019-10-08 |
| 10262943 | Interlevel conductor pre-fill utilizing selective barrier deposition | Artur Kolics, William T. Lee, Larry Zhao, Derek Wong, Praveen Nalla +2 more | 2019-04-16 |
| 10049921 | Method for selectively sealing ultra low-k porous dielectric layer using flowable dielectric film formed from vapor phase dielectric precursor | Nerissa Draeger, Deenesh Padhi, Derek Wong, Bart J. van Schravendijk, George Andrew Antonelli +3 more | 2018-08-14 |
| 9875968 | Interlevel conductor pre-fill utilizing selective barrier deposition | Artur Kolics, William T. Lee, Larry Zhao, Derek Wong, Praveen Nalla +2 more | 2018-01-23 |
| 9583386 | Interlevel conductor pre-fill utilizing selective barrier deposition | Artur Kolics, William T. Lee, Larry Zhao, Derek Wong, Praveen Nalla +2 more | 2017-02-28 |
| 9447499 | Dual plenum, axi-symmetric showerhead with edge-to-center gas delivery | Shambhu N. Roy, Vincent E. Burkhart, Natan Solomon, Sanjay Gopinath, Bart van Schravendijk +3 more | 2016-09-20 |
| 9406544 | Systems and methods for eliminating seams in atomic layer deposition of silicon dioxide film in gap fill applications | Wei Tang, Jason D. Park, Bart J. van Schravendijk | 2016-08-02 |
| 9299559 | Flowable oxide film with tunable wet etch rate | Nerissa Draeger, Karena Shannon, Bart van Schravendijk | 2016-03-29 |
| 9284644 | Apparatus and method for improving wafer uniformity | Kevin Madrigal, Frances Katherine Zelaya, Hsiang-Yun Lee | 2016-03-15 |
| 8846536 | Flowable oxide film with tunable wet etch rate | Nerissa Draeger, Karena Shannon, Bart van Schravendijk | 2014-09-30 |
| 8728958 | Gap fill integration | Michael Wood, John Drewery, Naohiro Shoda, Bart van Schravendijk, Lakshminarayana Nittala +1 more | 2014-05-20 |
| 8409985 | Methods for growing low-resistivity tungsten for high aspect ratio and small features | Lana Hiului Chan, Joshua Collins | 2013-04-02 |
| 8409987 | Method for depositing thin tungsten film with low resistivity and robust micro-adhesion characteristics | Anand Chandrashekar, Mirko Glass, Raashina Humayun, Michal Danek, Feng Chen +2 more | 2013-04-02 |
| 8367546 | Methods for forming all tungsten contacts and lines | Raashina Humayun, Karl B. Levy | 2013-02-05 |
| 8062977 | Ternary tungsten-containing resistive thin films | Raashina Humayun, Girish Dixit, Anna Battaglia, Stefano Rassiga | 2011-11-22 |
| 8058170 | Method for depositing thin tungsten film with low resistivity and robust micro-adhesion characteristics | Anand Chandrashekar, Mirko Glass, Raashina Humayun, Michael Danek, Feng Chen +2 more | 2011-11-15 |
| 8053365 | Methods for forming all tungsten contacts and lines | Raashina Humayun, Karl B. Levy | 2011-11-08 |
| 8043972 | Adsorption based material removal process | Xinye Liu, Joshua Collins | 2011-10-25 |
| 7955972 | Methods for growing low-resistivity tungsten for high aspect ratio and small features | Lana Hiului Chan, Joshua Collins | 2011-06-07 |
| 7691749 | Deposition of tungsten nitride | Karl B. Levy, Junghwan Sung, James A. Fair, Joshua Collins, Juwen Gao | 2010-04-06 |
| 7416989 | Adsorption based material removal process | Xinye Liu, Joshua Collins | 2008-08-26 |
| 7262125 | Method of forming low-resistivity tungsten interconnects | Panya Wongsenakhum, Aaron R. Fellis, Karl B. Levy, Juwen Gao, Joshua Collins +2 more | 2007-08-28 |