| 11682570 |
Process-induced displacement characterization during semiconductor production |
Pradeep Vukkadala, Mark D. Smith, Prasanna Dighe, Dieter Mueller |
2023-06-20 |
$468,350,000 |
| 11360398 |
System and method for tilt calculation based on overlay metrology measurements |
Roie Volkovich, Paul MacDonald, Jincheng Pei, Jinyan Song, Amnon Manassen |
2022-06-14 |
$72,328,000 |
| 11164768 |
Process-induced displacement characterization during semiconductor production |
Pradeep Vukkadala, Mark D. Smith, Prasanna Dighe, Dieter Mueller |
2021-11-02 |
$252,368,000 |
| 10475712 |
System and method for process-induced distortion prediction during wafer deposition |
Mark D. Smith |
2019-11-12 |
|
| 10466596 |
System and method for field-by-field overlay process control using measured and estimated field parameters |
Bill Pierson, Ramkumar Karur-Shanmugam, Chin-Chou Huang, John Robinson |
2019-11-05 |
|
| 10451412 |
Apparatus and methods for detecting overlay errors using scatterometry |
Michael Adel, Walter D. Mieher, Ibrahim Abdulhalim, Michael Friedmann |
2019-10-22 |
|
| 10409171 |
Overlay control with non-zero offset prediction |
Michael Adel, Amnon Manassen, William Pierson, Pradeep Subrahmanyan, Liran Yerushalmi +4 more |
2019-09-10 |
|
| 10216096 |
Process-sensitive metrology systems and methods |
Myungjun Lee, Mark D. Smith, Sanjay Kapasi, Stilian Ivanov Pandev, Dzmitry Sanko +1 more |
2019-02-26 |
|
| 10030965 |
Model-based hot spot monitoring |
Stilian Ivanov Pandev, Sanjay Kapasi, Mark D. Smith |
2018-07-24 |
|
| 10024654 |
Method and system for determining in-plane distortions in a substrate |
Mark D. Smith, Jose Solomon, Stuart Sherwin, Walter D. Mieher |
2018-07-17 |
|
| 9903711 |
Feed forward of metrology data in a metrology system |
Daniel Kandel, Michael Adel, Leonid Poslavsky, John Robinson, Tal Marciano +9 more |
2018-02-27 |
$104,541,000 |
| 9875946 |
On-device metrology |
Andrei V. Shchegrov, Jonathan M. Madsen, Stilian Ivanov Pandev, Daniel Kandel, Michael Adel +1 more |
2018-01-23 |
|
| 9846132 |
Small-angle scattering X-ray metrology systems and methods |
Michael S. Bakeman, Andrei V. Shchegrov, Guorong V. Zhuang, John J. Hench |
2017-12-19 |
|
| 9702693 |
Apparatus for measuring overlay errors |
Mark Ghinovker, Michael Adel, Walter D. Mieher, Dan Wack |
2017-07-11 |
|
| 9576861 |
Method and system for universal target based inspection and metrology |
Allen Park, Ellis Chang, Michael Adel, Kris Bhaskar, Amir Widmann +2 more |
2017-02-21 |
|
| 9222771 |
Acquisition of information for a construction site |
Eliezer Rosengaus, Kris Bhaskar |
2015-12-29 |
|
| 8604447 |
Solar metrology methods and apparatus |
Scott A. Young, Guoheng Zhao, Marco Guevremont, Neeraj Khanna |
2013-12-10 |
$16,118,000 |
| 8502979 |
Methods and systems for determining a critical dimension and overlay of a specimen |
Kyle Brown, Rodney Smedt, Gary Bultman, Mehrdad Nikoonahad, Dan Wack +2 more |
2013-08-06 |
$16,973,000 |
| 8436554 |
LED solar illuminator |
Guoheng Zhao, Alex Salnik, Mehdi Vaez-Iravani, Lena Nicolaides, Samuel Ngai |
2013-05-07 |
$49,115,000 |
| 8415961 |
Measuring sheet resistance and other properties of a semiconductor |
Guoheng Zhao, Alex Salnik, Lena Nicolaides |
2013-04-09 |
$24,090,000 |
| 8330281 |
Overlay marks, methods of overlay mark design and methods of overlay measurements |
Mark Ghinovker, Michael Adel, Walter D. Mieher, Dan Wack |
2012-12-11 |
$19,789,000 |
| 8179530 |
Methods and systems for determining a critical dimension and overlay of a specimen |
Kyle Brown, Rodney Smedt, Gary Bultman, Mehrdad Nikoonahad, Dan Wack +2 more |
2012-05-15 |
$20,701,000 |
| 8023110 |
Priori crack detection in solar photovoltaic wafers by detecting bending at edges of wafers |
Samuel Ngai |
2011-09-20 |
$38,542,000 |
| 7989729 |
Detecting and repairing defects of photovoltaic devices |
Guoheng Zhao, George H. Zapalac, Jr., Samuel Ngai, Mehdi Vaez-Iravani |
2011-08-02 |
$37,619,000 |
| 7951672 |
Measurement and control of strained devices |
Daniel Wack, John Fielden |
2011-05-31 |
$20,554,000 |
