Issued Patents All Time
Showing 51–75 of 85 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7300729 | Method for monitoring a reticle | Sterling Watson, Chris Mack, Stanley Stokowski, Zain Saidin | 2007-11-27 |
| 7297453 | Systems and methods for mitigating variances on a patterned wafer using a prediction model | Sterling Watson, Chris Mack, Stanley Stokowski, Zain Saidin | 2007-11-20 |
| 7298481 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Boris Golovanevsky, Michael Friedmann, Ian Smith, Michael Adel +4 more | 2007-11-20 |
| 7289213 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Boris Golovanesky, Michael Friedmann, Ian Smith, Michael Adel +1 more | 2007-10-30 |
| 7280212 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Boris Golovanesky, Michael Friedmann, Ian Smith, Michael Adel +3 more | 2007-10-09 |
| 7280230 | Parametric profiling using optical spectroscopic systems | Andrei V. Shchegrov, Anatoly Fabrikant, Mehrdad Nikoonahad, Daniel Wack, Noah Bareket +2 more | 2007-10-09 |
| 7274814 | Overlay marks, methods of overlay mark design and methods of overlay measurements | Mark Ghinovker, Michael Adel, Walter D. Mieher, Dan Wack | 2007-09-25 |
| 7242477 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Boris Golovanesky, Michael Friedmann, Ian Smith, Michael Adel +4 more | 2007-07-10 |
| 7196782 | Methods and systems for determining a thin film characteristic and an electrical property of a specimen | John Fielden, Kyle Brown, Gary Bultman, Mehrdad Nikoonahad, Dan Wack | 2007-03-27 |
| 7181057 | Overlay marks, methods of overlay mark design and methods of overlay measurements | Michael Adel, Mark Ghinovker, Walter D. Mieher, Dan Wack | 2007-02-20 |
| 7175945 | Focus masking structures, focus patterns and measurements thereof | Walter D. Mieher, Daniel Wack | 2007-02-13 |
| 7139083 | Methods and systems for determining a composition and a thickness of a specimen | John Fielden, Kyle Brown, Gary Bultman, Mehrdad Nikoonahad, Dan Wack | 2006-11-21 |
| 7130029 | Methods and systems for determining an adhesion characteristic and a thickness of a specimen | Dan Wack, Kyle Brown, Gary Bultman, Mehrdad Nikoonahad, John Fielden | 2006-10-31 |
| 7106425 | Methods and systems for determining a presence of defects and a thin film characteristic of a specimen | Gary Bultman, Kyle Brown, Mehrdad Nikoonahad, Dan Wack, John Fielden | 2006-09-12 |
| 7068833 | Overlay marks, methods of overlay mark design and methods of overlay measurements | Mark Ghinovker, Michael Adel, Walter D. Mieher, Dan Wack | 2006-06-27 |
| 7006235 | Methods and systems for determining overlay and flatness of a specimen | Kyle Brown, Mehrdad Nikoonahad, Gary Bultman, Dan Wack, John Fielden | 2006-02-28 |
| 6987572 | Methods and systems for lithography process control | Suresh Lakkapragada, Kyle Brown, Matt Hankinson | 2006-01-17 |
| 6950196 | Methods and systems for determining a thickness of a structure on a specimen and at least one additional property of the specimen | John Fielden, Kyle Brown, Gary Bultman, Mehrdad Nikoonahad, Dan Wack | 2005-09-27 |
| 6946394 | Methods and systems for determining a characteristic of a layer formed on a specimen by a deposition process | John Fielden, Kyle Brown, Gary Bultman, Mehrdad Nikoonahad, Dan Wack | 2005-09-20 |
| 6919957 | Methods and systems for determining a critical dimension, a presence of defects, and a thin film characteristic of a specimen | Mehrdad Nikoonahad, Kyle Brown, Gary Bultman, Dan Wack, John Fielden | 2005-07-19 |
| 6917419 | Methods and systems for determining flatness, a presence of defects, and a thin film characteristic of a specimen | John Fielden, Kyle Brown, Gary Bultman, Mehrdad Nikoonahad, Dan Wack | 2005-07-12 |
| 6917433 | Methods and systems for determining a property of a specimen prior to, during, or subsequent to an etch process | Kyle Brown, Gary Bultman, Mehrdad Nikoonahad, Dan Wack, John Fielden | 2005-07-12 |
| 6891610 | Methods and systems for determining an implant characteristic and a presence of defects on a specimen | Mehrdad Nikoonahad, Kyle Brown, Gary Bultman, Dan Wack, John Fielden | 2005-05-10 |
| 6891627 | Methods and systems for determining a critical dimension and overlay of a specimen | Kyle Brown, Gary Bultman, Mehrdad Nikoonahad, Dan Wack, John Fielden | 2005-05-10 |
| 6884552 | Focus masking structures, focus patterns and measurements thereof | Walter D. Mieher, Daniel Wack | 2005-04-26 |