Issued Patents All Time
Showing 26–50 of 58 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8982325 | Microlithographic projection exposure apparatus | Michael Totzeck, Aksel Goehnermeier, Wolfgang Singer, Helmut Beierl, Hans-Juergen Mann +1 more | 2015-03-17 |
| 8873151 | Illumination system for a microlithgraphic exposure apparatus | Alexander Sohmer, Aurelian Dodoc, Wilhelm Ulrich, Gerhard Fuerter, Rafael Egger +2 more | 2014-10-28 |
| 8837041 | Magnifying imaging optical system and metrology system with an imaging optical system of this type | Hans-Juergen Mann | 2014-09-16 |
| 8711472 | Optical imaging device and imaging method for microscopy | Hans-Juergen Mann | 2014-04-29 |
| 8674329 | Method and apparatus for analyzing and/or repairing of an EUV mask defect | Michael Budach, Tristan Bret, Klaus Edinger, Thorsten Hofmann, Johannes Ruoff | 2014-03-18 |
| 8605257 | Projection system with compensation of intensity variations and compensation element therefor | Patrick Scheible, Alexandra Pazidis, Reiner Garreis, Michael Totzeck, Paul Graeupner +2 more | 2013-12-10 |
| 8451458 | Imaging microoptics for measuring the position of an aerial image | Hans-Juergen Rostalski | 2013-05-28 |
| RE44216 | Microscope imaging system and method for emulating a high aperture imaging system, particularly for mask inspection | Michael Totzeck, Toralf Gruner, Karl-Heinz Schuster, Joern Greif-Wuestenbecker, Thomas Scheruebl +3 more | 2013-05-14 |
| 8436982 | Projection objective for microlithography | Helmut Beierl, Jochen Hetzler, Michael Totzeck | 2013-05-07 |
| 8345350 | Chromatically corrected objective with specifically structured and arranged dioptric optical elements and projection exposure apparatus including the same | Alexander Epple, Hans-Juergen Rostalski | 2013-01-01 |
| 8325426 | Projection objective of a microlithographic projection exposure apparatus | Karl-Heinz Schuster, Toralf Gruner, Michael Totzeck, Wilfried Clauss, Susanne Beder +2 more | 2012-12-04 |
| 8319944 | Projection lens system of a microlithographic projection exposure installation | Helmut Beierl, Sascha Bleidistel, Wolfgang Singer, Toralf Gruner, Alexander Epple +6 more | 2012-11-27 |
| 8310752 | Method of manufacturing a projection objective and projection objective | Toralf Gruner, Alexander Epple | 2012-11-13 |
| 8294991 | Interference systems for microlithgraphic projection exposure systems | Ralf Mueller, Toralf Gruner, Michael Totzeck, Hans-Jochen Paul | 2012-10-23 |
| 8211627 | Method and apparatus for structuring a radiation-sensitive material | — | 2012-07-03 |
| 8164759 | Imaging microoptics for measuring the position of an aerial image | Hans-Juergen Rostalski | 2012-04-24 |
| 8107054 | Microlithographic projection exposure apparatus | Michael Totzeck, Aksel Goehnermeier, Wolfgang Singer, Helmut Beierl, Hans-Juergen Mann +1 more | 2012-01-31 |
| 8068276 | Projection objective for lithography | Susanne Beder, Aurelian Dodoc, Alexander Epple, Hans-Juergen Rostalski | 2011-11-29 |
| 8031326 | Illumination system or projection lens of a microlithographic exposure system | Michael Totzeck, Susanne Beder, Wilfried Clauss, Daniel Kraehmer, Aurelian Dodoc | 2011-10-04 |
| 7982969 | Projection objective of a microlithographic projection exposure apparatus | Karl-Heinz Schuster, Toralf Gruner, Michael Totzeck, Wilfried Clauss, Susanne Beder +2 more | 2011-07-19 |
| 7965453 | Projection objective and projection exposure apparatus including the same | Wilhelm Ulrich, Aurelian Dodoc, Hans-Juergen Rostalski | 2011-06-21 |
| 7848031 | Hologram and method of manufacturing an optical element using a hologram | Jochen Hetzler, Susanne Beder | 2010-12-07 |
| 7835073 | Projection objective for lithography | Susanne Beder, Aurelian Dodoc, Alexander Epple, Hans-Juergen Rostalski | 2010-11-16 |
| 7834981 | Projection exposure apparatus, projection exposure method and projection objective | Hans-Juergen Rostalski, Wilhelm Ulrich | 2010-11-16 |
| 7800732 | Projection exposure method and projection exposure apparatus for microlithography | Joerg Zimmermann, Tilmann Heil, Paul Graeupner, Ulrich Gebhardt | 2010-09-21 |