Issued Patents All Time
Showing 51–58 of 58 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7782440 | Projection lens system of a microlithographic projection exposure installation | Helmut Beierl, Sascha Bleidistel, Wolfgang Singer, Toralf Gruner, Alexander Epple +6 more | 2010-08-24 |
| 7777963 | Method for improving the imaging properties of a projection objective, and such a projection objective | Olaf Conradi, Gerald Richter, Sascha Bleidistel, Andreas Frommeyer, Toralf Gruner +1 more | 2010-08-17 |
| 7738188 | Projection objective and projection exposure apparatus including the same | Wilhelm Ulrich, Aurelian Dodoc, Hans-Juergen Rostalski | 2010-06-15 |
| 7728975 | Method for describing, evaluating and improving optical polarization properties of a microlithographic projection exposure apparatus | Michael Totzeck, Daniel Kraehmer, Olaf Dittmann | 2010-06-01 |
| 7710640 | Projection objective of a microlithographic projection exposure apparatus | Susanne Beder, Daniel Kraehmer | 2010-05-04 |
| 7697211 | Symmetrical objective having four lens groups for microlithography | David Shafer, Aurelian Dodoc, Johannes Zellner, Wilhelm Ulrich, Holger Walter +3 more | 2010-04-13 |
| 7589903 | Projection objective adapted for use with different immersion fluids or liquids, method of conversion of such and production method | Susanne Beder, Wilhelm Ulrich, Wolfgang Singer, Toralf Gruner | 2009-09-15 |
| 7286284 | Microscope imaging system and method for emulating a high aperture imaging system, particularly for mask inspection | Michael Totzeck, Toralf Gruner, Karl-Heinz Schuster, Joern Greif-Wuestenbecker, Thomas Scheruebl +3 more | 2007-10-23 |