Issued Patents All Time
Showing 26–50 of 51 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10488768 | Beat patterns for alignment on small metrology targets | Bastiaan Onne Fagginger Auer, Hugo Augustinus Joseph Cramer, Anagnostis Tsiatmas, Mariya Vyacheslavivna Medvedyeva | 2019-11-26 |
| 10481503 | Method and apparatus for measuring a parameter of a lithographic process, substrate and patterning devices for use in the method | Maurits Van Der Schaar, Youping Zhang, Hendrik Jan Hidde Smilde, Anagnostis Tsiatmas, Adriaan Johan Van Leest +3 more | 2019-11-19 |
| 10474039 | Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method | Simon Gijsbert Josephus Mathijssen, Maikel Robert GOOSEN, Maurits Van Der Schaar, Arie Jeffrey Den Boef | 2019-11-12 |
| 10453758 | Method and apparatus to determine a patterning process parameter using an asymmetric optical characteristic distribution portion | Adriaan Johan Van Leest, Anagnostis Tsiatmas, Elliott Gerard McNamara, Alok Verma, Thomas Theeuwes +1 more | 2019-10-22 |
| 10394137 | Inspection method, lithographic apparatus, mask and substrate | Youri Johannes Laurentius Maria Van Dommelen, Peter David Engblom, Lambertus Gerardus Maria Kessels, Arie Jeffrey Den Boef, Kaustuve Bhattacharyya +1 more | 2019-08-27 |
| 10133191 | Method for determining a process window for a lithographic process, associated apparatuses and a computer program | Wim Tjibbo Tel, Frank Staals, Reiner Maria Jungblut | 2018-11-20 |
| 10054862 | Inspection apparatus, inspection method, lithographic apparatus, patterning device and manufacturing method | Anton Bernhard Van Oosten, Robertus Cornelis Martinus De Kruif, Robert John Socha | 2018-08-21 |
| 10001711 | Inspection method, lithographic apparatus, mask and substrate | Youri Johannes Laurentius Maria Van Dommelen, Peter David Engblom, Lambertus Gerardus Maria Kessels, Arie Jeffrey Den Boef, Kaustuve Bhattacharyya +1 more | 2018-06-19 |
| 10001710 | Inspection apparatus, inspection method, lithographic apparatus and manufacturing method | Frank Staals, Carlo Cornelis Maria Luijten, Anton Bernhard Van Oosten | 2018-06-19 |
| 9964853 | Method of determining dose and focus, inspection apparatus, patterning device, substrate and device manufacturing method | Peter Clement Paul Vanoppen, Eric Brouwer, Hugo Augustinus Joseph Cramer, Jan Hendrik Den Besten, Adrianus Franciscus Petrus Engelen | 2018-05-08 |
| 9939735 | Method of determining focus, inspection apparatus, patterning device, substrate and device manufacturing method | Shu-jin Wang, Christian Marinus Leewis, Kuo-Feng PAO | 2018-04-10 |
| 9594299 | Method of determining focus, inspection apparatus, patterning device, substrate and device manufacturing method | Shu-jin Wang, Christian Marinus Leewis, Kuo-Feng PAO | 2017-03-14 |
| 9217916 | Lithographic apparatus and device manufacturing method | Marcus Adrianus Van De Kerkhof, Reiner Maria Jungblut, Koenraad Remi André Maria Schreel | 2015-12-22 |
| 9182682 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Hugo Augustinus Joseph Cramer | 2015-11-10 |
| 8830447 | Inspection method for lithography | Arie Jeffrey Den Boef, Hugo Augustinus Joseph Cramer | 2014-09-09 |
| 8685626 | Method of measuring a characteristic | Johannes Anna Quaedackers, Antoine Gaston Marie Kiers, Christian Marinus Leewis | 2014-04-01 |
| 8263296 | Lithographic apparatus and device manufacturing method | Marcus Adrianus Van De Kerkhof, Reiner Maria Jungblut, Koenraad Remi André Maria Schreel | 2012-09-11 |
| 8139217 | Alignment systems and methods for lithographic systems | Franciscus Bernardus Maria Van Bilsen, Jacobus Burghoorn, Richard Johannes Franciscus Van Haren, Hermanus Gerardus Van Horssen, Jeroen Huijbregtse +9 more | 2012-03-20 |
| 7880880 | Alignment systems and methods for lithographic systems | Franciscus Bernardus Maria Van Bilsen, Jacobus Burghoorn, Richard Johannes Franciscus Van Haren, Hermanus Gerardus Van Horssen, Jeroen Huijbregtse +9 more | 2011-02-01 |
| 7619738 | Marker structure for optical alignment of a substrate, a substrate including such a marker structure, an alignment method for aligning to such a marker structure, and a lithographic projection apparatus | Richard Johannes Franciscus Van Haren, Sanjay Lalbahadoersing, Henry Megens, Maurits Van Der Schaar | 2009-11-17 |
| 7573574 | Lithographic apparatus and device manufacturing method | Richard Johannes Franciscus Van Haren, Hubertus Johannes Gertrudus Simons | 2009-08-11 |
| 7439531 | Alignment systems and methods for lithographic systems | Franciscus Bernardus Maria Van Bilsen, Jacobus Burghoorn, Richard Johannes Franciscus Van Haren, Hermanus Gerardus Van Horssen, Jeroen Huijbregtse +9 more | 2008-10-21 |
| 7332732 | Alignment systems and methods for lithographic systems | Franciscus Bernardus Maria Van Bilsen, Jacobus Burghoorn, Richard Johannes Franciscus Van Haren, Hermanus Gerardus Van Horssen, Jeroen Huijbregtse +9 more | 2008-02-19 |
| 7329888 | Alignment systems and methods for lithographic systems | Franciscus Bernardus Maria Van Bilsen, Jacobus Burghoorn, Richard Johannes Franciscus Van Haren, Hermanus Gerardus Van Horssen, Jeroen Huijbregtse +9 more | 2008-02-12 |
| 7330261 | Marker structure for optical alignment of a substrate, a substrate including such a marker structure, an alignment method for aligning to such a marker structure, and a lithographic projection apparatus | Richard Johannes Franciscus Van Haren, Sanjay Lalbahadoersing, Henry Megens, Maurits Van Der Schaar | 2008-02-12 |