Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9939735 | Method of determining focus, inspection apparatus, patterning device, substrate and device manufacturing method | Paul Christiaan Hinnen, Shu-jin Wang, Christian Marinus Leewis | 2018-04-10 |
| 9594299 | Method of determining focus, inspection apparatus, patterning device, substrate and device manufacturing method | Paul Christiaan Hinnen, Shu-jin Wang, Christian Marinus Leewis | 2017-03-14 |