Issued Patents All Time
Showing 26–50 of 75 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9982363 | Silicon wafers by epitaxial deposition | Tirunelveli S. Ravi, Andrzej Kaszuba, Quoc Truong, Jean R. Vatus | 2018-05-29 |
| 9920451 | High throughput multi-wafer epitaxial reactor | Kedarnath Sangam, Tirunelveli S. Ravi, Andrzej Kaszuba, Quoc Truong | 2018-03-20 |
| 9556522 | High throughput multi-wafer epitaxial reactor | Kedarnath Sangam, Tirunelveli S. Ravi, Andrzej Kaszuba, Quoc Truong | 2017-01-31 |
| 9337072 | Apparatus and method for substrate clamping in a plasma chamber | Ganesh Balasubramanian, Amit Kumar BANSAL, Eller Y. Juco, Mohamad A. Ayoub, Hyung Joon Kim +11 more | 2016-05-10 |
| 9255346 | Silicon wafers by epitaxial deposition | Tirunelveli S. Ravi, Andrzej Kaszuba, Quoc Truong, Jean R. Vatus | 2016-02-09 |
| 9206511 | Method and system for supplying a cleaning gas into a process chamber | Ramprakash Sankarakrishnan, Dale R. Du Bois, Ganesh Balasubramanian, Karthik Janakiraman, Juan Carlos Rocha-Alvarez +2 more | 2015-12-08 |
| 8900399 | Integrated method and system for manufacturing monolithic panels of crystalline solar cells | Tirunelveli S. Ravi, Ananda H. Kumar, Ashish Asthana, Kyle Tantiwong | 2014-12-02 |
| 8673081 | High throughput multi-wafer epitaxial reactor | Kedarnath Sangam, Tirunelveli S. Ravi, Andrzej Kaszuba, Quoc Truong | 2014-03-18 |
| 8663753 | High throughput multi-wafer epitaxial reactor | Kedarnath Sangam, Tirunelveli S. Ravi, Andrzej Kaszuba, Quoc Vinh | 2014-03-04 |
| 8591699 | Method and system for supplying a cleaning gas into a process chamber | Ramprakash Sankarakrishnan, Dale R. Du Bois, Ganesh Balasubramanian, Karthik Janakiraman, Juan Carlos Rocha-Alvarez +2 more | 2013-11-26 |
| 8298629 | High throughput multi-wafer epitaxial reactor | Kedarnath Sangam, Tirunelveli S. Ravi, Andrzej Kaszuba, Quoc Truong | 2012-10-30 |
| 8282734 | Methods to improve the in-film defectivity of PECVD amorphous carbon films | Deenesh Padhi, Chiu Chan, Sudha Rathi, Ganesh Balasubramanian, Jianhua Zhou +4 more | 2012-10-09 |
| 8197636 | Systems for plasma enhanced chemical vapor deposition and bevel edge etching | Ashish Shah, Dale R. DuBois, Ganesh Balasubramanian, Mark Fodor, Eui Kyoon Kim +7 more | 2012-06-12 |
| 7947611 | Method of improving initiation layer for low-k dielectric film by digital liquid flow meter | Dustin W. Ho, Juan Carlos Rocha-Alvarez, Alexandros T. Demos, Kelvin Chan, Nagarajan Rajagopalan | 2011-05-24 |
| 7867578 | Method for depositing an amorphous carbon film with improved density and step coverage | Deenesh Padhi, Hyoung-Chan Ha, Sudha Rathi, Derek R. Witty, Chiu Chan +6 more | 2011-01-11 |
| 7699935 | Method and system for supplying a cleaning gas into a process chamber | Ramprakash Sankarakrishnan, Dale R. DuBois, Ganesh Balasubramanian, Karthik Janakiraman, Juan Carlos Rocha-Alvarez +2 more | 2010-04-20 |
| 7582167 | Apparatus for reducing entrapment of foreign matter along a moveable shaft of a substrate support | Andrzej Kaszuba, Sophia M. Velastegui, Pyongwon Yim, Mario David Silvetti, Tom K. Cho +2 more | 2009-09-01 |
| 7514125 | Methods to improve the in-film defectivity of PECVD amorphous carbon films | Deenesh Padhi, Chiu Chan, Sudha Rathi, Ganesh Balasubramanian, Jianhua Zhou +4 more | 2009-04-07 |
| 7410916 | Method of improving initiation layer for low-k dielectric film by digital liquid flow meter | Dustin W. Ho, Juan Carlos Rocha-Alvarez, Alexandros T. Demos, Kelvin Chan, Nagarajan Rajagopalan | 2008-08-12 |
| 7407893 | Liquid precursors for the CVD deposition of amorphous carbon films | Martin Jay Seamons, Wendy H. Yeh, Sudha Rathi, Deenesh Padhi, Andy Luan +6 more | 2008-08-05 |
| 7354288 | Substrate support with clamping electrical connector | Kazutoshi Maehara, Kentaro WADA, Mark Fodor, Andrzei Kaszuba | 2008-04-08 |
| 7279049 | Apparatus for reducing entrapment of foreign matter along a moveable shaft of a substrate support | Andrzej Kaszuba, Sophia M. Velastegui, Pyongwon Yim, Mario David Silvetti, Tom K. Cho +2 more | 2007-10-09 |
| 7107125 | Method and apparatus for monitoring the position of a semiconductor processing robot | Pyongwon Yim, Satish Sundar, Vinay Shah, Mario David Silvetti, Douglas Kitajima +3 more | 2006-09-12 |
| 7094313 | Universal mid-frequency matching network | Eller Y. Juco, Mario David Silvetti, Talex Sajoto | 2006-08-22 |
| 7055808 | Vaporizing reactant liquids for chemical vapor deposition film processing | John M. White, Koichi Ishikawa, Hideaki Miyamoto, Takeshi Kawano | 2006-06-06 |