Issued Patents All Time
Showing 51–75 of 75 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7055809 | Vaporizing reactant liquids for chemical vapor deposition film processing | John M. White | 2006-06-06 |
| 7024105 | Substrate heater assembly | Mark Fodor, Sophia M. Velastegui, Soovo Sen, Peter Wai-Man Lee, Mario David Silvetti | 2006-04-04 |
| 6911403 | Methods of reducing plasma-induced damage for advanced plasma CVD dielectrics | Lihua Li, Tsutomu Tanaka, Tzu-Fang Huang, Li-Qun Xia, Dian Sugiarto +2 more | 2005-06-28 |
| 6783118 | Vaporizing reactant liquids for chemical vapor deposition film processing | John M. White | 2004-08-31 |
| 6663713 | Method and apparatus for forming a thin polymer layer on an integrated circuit structure | Stuardo Robles, Bang Nguyen, Gayathri Rao, Gary Fong, Vicente Lam +2 more | 2003-12-16 |
| 6645303 | Heater/lift assembly for high temperature processing chamber | Jonathan Frankel, Hari Ponnekanti, Inna Shmurun | 2003-11-11 |
| 6616973 | Liquid phosphorous precursor delivery apparatus | Chau Nguyen | 2003-09-09 |
| 6444037 | Chamber liner for high temperature processing chamber | Jonathan Frankel | 2002-09-03 |
| 6347636 | Methods and apparatus for gettering fluorine from chamber material surfaces | Li-Qun Xia, Srinivas D. Nemani, Ellie Yieh, Gary Fong | 2002-02-19 |
| 6224681 | Vaporizing reactant liquids for chemical vapor deposition film processing | John M. White | 2001-05-01 |
| 6132517 | Multiple substrate processing apparatus for enhanced throughput | Tirunelveli S. Ravi, Kramadhati V. Ravi | 2000-10-17 |
| 6096134 | Liquid delivery system | Jun Zhao, Charles Dornfest, Vincent Ku, Frank Chang | 2000-08-01 |
| 6063198 | High pressure release device for semiconductor fabricating equipment | Won Bae Bang, Estela Guijosa | 2000-05-16 |
| 6019848 | Lid assembly for high temperature processing chamber | Jonathan Frankel, Inna Shmurun, Eugene Fukshansky | 2000-02-01 |
| 6009827 | Apparatus for creating strong interface between in-situ SACVD and PECVD silicon oxide films | Stuardo Robles, Maria Galiano, Victoria Kithcart | 2000-01-04 |
| 5968588 | In-situ liquid flow rate estimation and verification by sonic flow method | Yen-Kun Wang, Fong Chang, Thanh Pham, Jeff Plante | 1999-10-19 |
| 5935340 | Method and apparatus for gettering fluorine from chamber material surfaces | Li-Qun Xia, Srinivas D. Nemani, Ellie Yieh, Gary Fong | 1999-08-10 |
| 5925189 | Liquid phosphorous precursor delivery apparatus | Chau Nguyen | 1999-07-20 |
| 5879574 | Systems and methods for detecting end of chamber clean in a thermal (non-plasma) process | Gary Fong | 1999-03-09 |
| 5872065 | Method for depositing low K SI-O-F films using SIF.sub.4 /oxygen chemistry | — | 1999-02-16 |
| 5814377 | Method and apparatus for creating strong interface between in-situ SACVD and PECVD silicon oxide films | Stuardo Robles, Maria Galiano, Victoria Kithcart | 1998-09-29 |
| 5725675 | Silicon carbide constant voltage gradient gas feedthrough | Gary Fong, Vincente Lim | 1998-03-10 |
| 5648175 | Chemical vapor deposition reactor system and integrated circuit | Kathleen S. Russell, Stuardo Robles, Bang Nguyen | 1997-07-15 |
| 5645642 | Method for in-situ liquid flow rate estimation and verification | Hiroshi Nishizato, Jun Zhao | 1997-07-08 |
| 5520969 | Method for in-situ liquid flow rate estimation and verification | Hiroshi Nishizato, Jun Zhao | 1996-05-28 |