Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7941237 | Flat panel display substrate testing system | N. William Parker, S. Daniel Miller | 2011-05-10 |
| 6638886 | Plasma fluorine resistant alumina ceramic material and method of making | Anand Gupta | 2003-10-28 |
| 6376391 | Pulsed or tailored bias for filling gaps with low dielectric constant material | Darin Scott Olson | 2002-04-23 |
| 6132517 | Multiple substrate processing apparatus for enhanced throughput | Visweswaren Sivaramakrishnan, Kramadhati V. Ravi | 2000-10-17 |
| 6083451 | Method of producing a polycrystalline alumina ceramic which is resistant to a fluorine-comprising plasma | Anand Gupta | 2000-07-04 |
| 6060397 | Gas chemistry for improved in-situ cleaning of residue for a CVD apparatus | Martin Jay Seamons, Cary Ching, Kou Imaoka, Tatsuya Sato, Michael C. Triplett | 2000-05-09 |
| 6051284 | Chamber monitoring and adjustment by plasma RF metrology | Joshua E. Byrne, Martin Jay Seamons, Eric Hanson | 2000-04-18 |
| 5807785 | Low dielectric constant silicon dioxide sandwich layer | — | 1998-09-15 |