Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6060397 | Gas chemistry for improved in-situ cleaning of residue for a CVD apparatus | Martin Jay Seamons, Cary Ching, Tatsuya Sato, Tirunelveli S. Ravi, Michael C. Triplett | 2000-05-09 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6060397 | Gas chemistry for improved in-situ cleaning of residue for a CVD apparatus | Martin Jay Seamons, Cary Ching, Tatsuya Sato, Tirunelveli S. Ravi, Michael C. Triplett | 2000-05-09 |