Issued Patents All Time
Showing 176–200 of 251 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6869896 | Plasma processes for depositing low dielectric constant films | David Cheung, Wai-Fan Yau, Robert P. Mandal, Shin-Puu Jeng, Kuo-Wei Liu +5 more | 2005-03-22 |
| 6853141 | Capacitively coupled plasma reactor with magnetic plasma control | Daniel J. Hoffman, Matthew L. Miller, Jang-Gyoo Yang, Heeyeop Chae, Michael Barnes +1 more | 2005-02-08 |
| D501448 | Electrical connector | — | 2005-02-01 |
| 6833052 | Deposition chamber and method for depositing low dielectric constant films | Shijian Li, Yaxin Wang, Fred C. Redeker, Alan W. Collins | 2004-12-21 |
| 6814814 | Cleaning residues from surfaces in a chamber by sputtering sacrificial substrates | Alan W. Collins, Feng Gao, Padmanaban Krishnaraj, Yaxin Wang | 2004-11-09 |
| 6776875 | Semiconductor substrate support assembly having lobed o-rings therein | Rudolf Gujer, Thomas Cho | 2004-08-17 |
| 6768878 | Image forming method and image forming apparatus utilizing a control patch | Toru Komatsu, Hirotaka Kabashima, Toru Yamaguchi | 2004-07-27 |
| 6759624 | Method and apparatus for heating a semiconductor wafer plasma reactor vacuum chamber | Ananda H. Kumar, Kwok Manus Wong, Farahmand Askarinam | 2004-07-06 |
| 6734115 | Plasma processes for depositing low dielectric constant films | David Cheung, Wai-Fan Yau, Robert P. Mandal, Shin-Puu Jeng, Kuo-Wei Liu +5 more | 2004-05-11 |
| 6722761 | Inkjet recording head and inkjet recording device | Shinya Asano, Yukuo Yamaguchi | 2004-04-20 |
| 6709218 | Robot blade for semiconductor processing equipment | Frederik W. Freerks, Timothy Wang, Jeffrey C. Hudgens, James R. Ciulik, Mohsen Salek +2 more | 2004-03-23 |
| 6667527 | Temperature sensor with shell | Brian Lue, Liang Wang | 2003-12-23 |
| 6660662 | Method of reducing plasma charge damage for plasma processes | Alexandros T. Demos, Seon-Mee Cho, Feng Gao, Kaveh Niazi, Michio Aruga | 2003-12-09 |
| 6660656 | Plasma processes for depositing low dielectric constant films | David Cheung, Wai-Fan Yau, Robert P. Mandal, Shin-Puu Jeng, Kuo-Wei Liu +5 more | 2003-12-09 |
| 6656286 | Pedestal with a thermally controlled platen | Thomas Cho | 2003-12-02 |
| 6639962 | Preventive maintenance method and apparatus of a structural member in a reactor pressure vessel | Kunio Enomoto, Katsuhiko Hirano, Eisaku Hayashi, Ren Morinaka, Sadato Shimizu +2 more | 2003-10-28 |
| 6596653 | Hydrogen assisted undoped silicon oxide deposition process for HDP-CVD | Zhengquan Tan, Dongqing Li, Walter Zygmunt | 2003-07-22 |
| 6596655 | Plasma processes for depositing low dielectric constant films | David Cheung, Wai-Fan Yau, Robert P. Mandal, Shin-Puu Jeng, Kuo-Wei Liu +5 more | 2003-07-22 |
| 6589610 | Deposition chamber and method for depositing low dielectric constant films | Shijian Li, Yaxin Wang, Fred C. Redeker, Alan W. Collins | 2003-07-08 |
| 6572708 | Semiconductor wafer support lift-pin assembly | Rudolf Gujer, Thomas Cho, Lily Pang, Michael P. Karazim | 2003-06-03 |
| 6562690 | Plasma processes for depositing low dielectric constant films | David Cheung, Wai-Fan Yau, Robert P. Mandal, Shin-Puu Jeng, Kuo-Wei Liu +5 more | 2003-05-13 |
| 6545420 | Plasma reactor using inductive RF coupling, and processes | Kenneth S. Collins, Craig A. Roderick, John Trow, Chan-Lon Yang, Jerry Wong +6 more | 2003-04-08 |
| 6541282 | Plasma processes for depositing low dielectric constant films | David Cheung, Wai-Fan Yau, Robert P. Mandal, Shin-Puu Jeng, Kuo-Wei Liu +5 more | 2003-04-01 |
| 6523563 | Modular gas panel closet for a semiconductor wafer processing platform | Thomas Cho, Robert Navasca | 2003-02-25 |
| 6519991 | Water jet peening apparatus | Katsuhiko Hirano, Kunio Enomoto, Eisaku Hayashi, Sadato Shimizu, Ren Morinaka +2 more | 2003-02-18 |