Issued Patents All Time
Showing 26–50 of 79 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10752990 | Apparatus and methods to remove residual precursor inside gas lines post-deposition | Daping Yao, Kenric Choi, Xiaoxiong Yuan, Jiang Lu, Can Xu +1 more | 2020-08-25 |
| 10755947 | Methods of increasing selectivity for selective etch processes | Wenyu Zhang, Yixiong Yang, Mario D. Sanchez, Guoqiang Jian, Wei V. Tang | 2020-08-25 |
| 10707122 | Methods for depositing dielectric barrier layers and aluminum containing etch stop layers | Sree Rangasai V. Kesapragada, Kevin Moraes, Srinivas Guggilla, He Ren, Mehul Naik +6 more | 2020-07-07 |
| 10665450 | Methods and apparatus for doping engineering and threshold voltage tuning by integrated deposition of titanium nitride and aluminum films | Yixiong Yang, Wei V. Tang, Wenyu Zhang, Shih Chung Chen, CHEN-HAN LIN +6 more | 2020-05-26 |
| 10665542 | Cobalt manganese vapor phase deposition | Sang Ho Yu, Jiang Lu, Ben-Li Sheu | 2020-05-26 |
| 10643840 | Selective deposition defects removal by chemical etch | Jeffrey W. Anthis, Chang Ke, Pratham Jain, Benjamin Schmiege, Guoqiang Jian +3 more | 2020-05-05 |
| 10640870 | Gas feedthrough assembly | Daping Yao, Hyman Lam, Jiang Lu, Dien-Yeh Wu, Can Xu +1 more | 2020-05-05 |
| 10615041 | Methods and materials for modifying the threshold voltage of metal oxide stacks | Siddarth A. Krishnan, Rajesh Sathiyanarayanan, Atashi Basu | 2020-04-07 |
| 10608097 | Low thickness dependent work-function nMOS integration for metal gate | Seshadri Ganguli, Shih Chung Chen, Rajesh Sathiyanarayanan, Atashi Basu, Lin Dong +3 more | 2020-03-31 |
| 10600685 | Methods to fill high aspect ratio features on semiconductor substrates with MOCVD cobalt film | Daping Yao, Jiang Lu, Can Xu, Mei Chang | 2020-03-24 |
| 10593592 | Laminate and core shell formation of silicide nanowire | Bencherki Mebarki, Annamalai Lakshmanan, Kaushal K. Singh, Mehul Naik, Andrew Cockburn +1 more | 2020-03-17 |
| 10559578 | Deposition of cobalt films with high deposition rate | Jacqueline S. Wrench, Jing Zhou, Fuqun Grace Vasiknanonte, Jiang Lu, Nobuyuki Sasaki +3 more | 2020-02-11 |
| 10487399 | Atomic layer deposition chamber with counter-flow multi inject | Dien-Yeh Wu, Guodan Wei, Chun-Teh Kao | 2019-11-26 |
| 10487398 | Synthesis of metal nitride thin films materials using hydrazine derivatives | Byunghoon Yoon, Seshadri Ganguli, Siddarth A. Krishnan, Sang Ho Yu | 2019-11-26 |
| 10453657 | Apparatus for depositing metal films with plasma treatment | Daping Yao, Hyman Lam, John C. Forster, Jiang Lu, Can Xu +2 more | 2019-10-22 |
| 10431493 | Doping control of metal nitride films | Annamalai Lakshmanan, Ben-Li Sheu, Guodan Wei, Nicole Lundy | 2019-10-01 |
| RE47440 | Apparatus and method for providing uniform flow of gas | Joseph Yudovsky, Mei Chang, Faruk Gungor, David Chu, Chien-Teh Kao +2 more | 2019-06-18 |
| 10204764 | Methods for forming a metal silicide interconnection nanowire structure | Bencherki Mebarki, Annamalai Lakshmanan, Kaushal K. Singh, Andrew Cockburn, Ludovic Godet +1 more | 2019-02-12 |
| 10170321 | Aluminum content control of TiAIN films | Wenyu Zhang, Wei V. Tang, Yixiong Yang, CHEN-HAN LIN, Yi Xu +8 more | 2019-01-01 |
| 10109520 | Methods for depositing dielectric barrier layers and aluminum containing etch stop layers | Sree Rangasai V. Kesapragada, Kevin Moraes, Srinivas Guggilla, He Ren, Mehul Naik +6 more | 2018-10-23 |
| 10043709 | Methods for thermally forming a selective cobalt layer | Hua Ai, Jiang Lu, Avgerinos V. Gelatos, Sang Ho Yu, Feng Q. Liu +2 more | 2018-08-07 |
| 10014185 | Selective etch of metal nitride films | Liqi Wu, Wenyu Zhang, Shih Chung Chen, Wei V. Tang, Leung Kway Lee +1 more | 2018-07-03 |
| 10008412 | Doping control of metal nitride films | Annamalai Lakshmanan, Ben-Li Sheu, Guodan Wei, Nicole Lundy | 2018-06-26 |
| 10002834 | Method and apparatus for protecting metal interconnect from halogen based precursors | Mehul Naik, Tae Hong Ha, Srinivas Guggilla | 2018-06-19 |
| 9953926 | Methods of depositing cobalt manganese films | Sang Ho Yu, Jiang Lu, Ben-Li Sheu | 2018-04-24 |