Issued Patents All Time
Showing 76–79 of 79 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7748400 | Chemical delivery apparatus for CVD or ALD | Norman Nakashima, Christophe Marcadal, Seshadri Ganguli, Schubert S. Chu | 2010-07-06 |
| 7682946 | Apparatus and process for plasma-enhanced atomic layer deposition | Kavita Shah, Dien-Yeh Wu, Seshadri Ganguli, Christophe Marcadal, Frederick Wu +1 more | 2010-03-23 |
| 7568495 | Chemical delivery apparatus for CVD or ALD | Norman Nakashima, Christophe Marcadal, Seshadri Ganguli, Schubert S. Chu | 2009-08-04 |
| 7562672 | Chemical delivery apparatus for CVD or ALD | Norman Nakashima, Christophe Marcadal, Seshadri Ganguli, Schubert S. Chu | 2009-07-21 |