Issued Patents All Time
Showing 26–50 of 296 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7980611 | Substrate holding apparatus, substrate transferring robot equipped with the same, and semiconductor production apparatus | Hideharu Zenpo, Hideo Yamamoto, Toshiyuki Harada, Yoshihiro Kusama | 2011-07-19 |
| 7952071 | Apparatus and method for inspecting sample surface | Nobuharu Noji, Yoshihiko Naito, Hirosi Sobukawa, Masahiro Hatakeyama, Kenji Terao +2 more | 2011-05-31 |
| 7942647 | Pump for supplying chemical liquids | Shigenobu Itoh, Kazuhiro Sugata, Kazuhiro Arakawa | 2011-05-17 |
| 7922862 | Plasma processing apparatus, electrode plate for plasma processing apparatus, and electrode plate manufacturing method | Shinji Himori, Kazuya Nagaseki, Hiroki Matsumaru, Shoichiro Matsuyama, Toshiki Takahashi | 2011-04-12 |
| 7862959 | Transfer mask for exposure and pattern exchanging method of the same | Kazuya Nagaseki, Naoyuki Satoh | 2011-01-04 |
| 7829975 | Multichip semiconductor device, chip therefor and method of formation thereof | Nobuo Hayasaka, Keiichi Sasaki, Mie Matsuo | 2010-11-09 |
| 7766341 | Seal structure, fluid device, integrated valve, and sealing member | Shoichi Kitagawa, Shigenobu Itoh, Kazuhiro Sugata, Kazuhiro Arakawa, Hiroshi Tomita | 2010-08-03 |
| 7750654 | Probe method, prober, and electrode reducing/plasma-etching processing mechanism | Shigekazu Komatsu, Yuichi Abe, Kunihiro Furuya, Vincent Vezin, Kenichi Kubo | 2010-07-06 |
| 7742277 | Dielectric film capacitor and method of manufacturing the same | Tomotaka Shinoda, Kinji Yamada, Takahiro Kitano, Yoshiki Yamanishi, Muneo Harada +3 more | 2010-06-22 |
| 7740410 | Developing apparatus and developing method | Takanori Nishi, Takahiro Kitano | 2010-06-22 |
| 7700381 | Semiconductor wafer with ID mark, equipment for and method of manufacturing semiconductor device from them | Tsunetoshi Arikado, Masao Iwase, Soichi Nadahara, Yuso Udo, Yukihiro Ushiku +8 more | 2010-04-20 |
| 7686588 | Liquid chemical supply system having a plurality of pressure detectors | Tetsuya Toyoda, Tomohiro Ito, Akira Murakumo, Atsuyuki Sakai | 2010-03-30 |
| 7649369 | Probe and method of manufacturing probe | Toshihiro Yonezawa | 2010-01-19 |
| 7641806 | Manufacturing method for membrane member | Kazuya Nagaseki, Naoyuki Satoh, Koji Maruyama | 2010-01-05 |
| 7604832 | Film forming method, film forming apparatus, pattern forming method, and manufacturing method of semiconductor apparatus | Shinichi Ito, Tatsuhiko Ema, Kei Hayasaki, Rempei Nakata, Nobuhide Yamada | 2009-10-20 |
| 7585386 | Plasma processing apparatus, electrode plate for plasma processing apparatus, and electrode plate manufacturing method | Shinji Himori, Kazuya Nagaseki, Hiroki Matsumaru, Shoichiro Matsuyama, Toshiki Takahashi | 2009-09-08 |
| 7575664 | Plating method | Tetsuo Matsuda, Hisashi Kaneko | 2009-08-18 |
| 7470998 | Semiconductor device and method of manufacturing the same | Koji Maruyama, Kazuya Nagaseki, Akiteru Rai | 2008-12-30 |
| 7435769 | Flame resistant synthetic resin composition | Daishiro Kishimoto, Toru Makino, Juji Uchida | 2008-10-14 |
| 7387717 | Method of performing electrolytic treatment on a conductive layer of a substrate | Junji Kunisawa, Mitsuko Odagaki, Natsuki Makino, Koji Mishima, Kenji Nakamura +7 more | 2008-06-17 |
| 7383732 | Device for inspecting micro structure, method for inspecting micro structure and program for inspecting micro structure | Toshiyuki Matsumoto, Naoki Ikeuchi, Masami Yakabe | 2008-06-10 |
| 7351131 | Method for manufacturing semiconductor device and polishing apparatus | Kenro Nakamura, Naoto Miyashita, Takashi Yoda | 2008-04-01 |
| 7335517 | Multichip semiconductor device, chip therefor and method of formation thereof | Nobuo Hayasaka, Keiichi Sasaki, Mie Matsuo | 2008-02-26 |
| 7312018 | Film forming method, film forming apparatus, pattern forming method, and manufacturing method of semiconductor apparatus | Shinichi Ito, Tatsuhiko Ema, Kei Hayasaki, Rempei Nakata, Nobuhide Yamada | 2007-12-25 |
| 7291057 | Apparatus for polishing a substrate | Norio Kimura, Yu Ishii, Hirokuni Hiyama, Hiroyuki Yano | 2007-11-06 |