Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10309428 | Method for controlling gas-pressure-driven apparatus and gas-pressure-driven apparatus | — | 2019-06-04 |
| 10302077 | Liquid supply system and method for controlling liquid supply system | — | 2019-05-28 |
| 7686588 | Liquid chemical supply system having a plurality of pressure detectors | Katsuya Okumura, Tetsuya Toyoda, Tomohiro Ito, Akira Murakumo | 2010-03-30 |
| 5134962 | Spin coating apparatus | Haruo Amada, Akihiro Kojima, Hiroshi Kagohashi, Katsumasa Shimura, Hisamitsu Maekawa | 1992-08-04 |