Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5134962 | Spin coating apparatus | Haruo Amada, Akihiro Kojima, Hiroshi Kagohashi, Atsuyuki Sakai, Katsumasa Shimura | 1992-08-04 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5134962 | Spin coating apparatus | Haruo Amada, Akihiro Kojima, Hiroshi Kagohashi, Atsuyuki Sakai, Katsumasa Shimura | 1992-08-04 |