Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7980611 | Substrate holding apparatus, substrate transferring robot equipped with the same, and semiconductor production apparatus | Hideo Yamamoto, Toshiyuki Harada, Yoshihiro Kusama, Katsuya Okumura | 2011-07-19 |
| 6533530 | Wafer transferring robot | — | 2003-03-18 |
| 4529352 | Cable support of a robot | Takeo Suzuki, Yoshihiro Yurita | 1985-07-16 |
| 4507042 | Cable support of a robot | Takeo Suzuki, Yoshihiro Yurita | 1985-03-26 |
| 4503722 | Arm operating device in automatic operating machine | Takeo Suzuki, Itsuro Matsumoto, Yoshihiro Yurita | 1985-03-12 |