Issued Patents All Time
Showing 51–75 of 115 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7678586 | Structure and method to prevent charge damage from e-beam curing process | Huang Liu, Bei Chao Zhang, Wuping Liu, John Sudijono | 2010-03-16 |
| 7655388 | Mask and method to pattern chromeless phase lithography contact hole | Sia Kim Tan, Soon Yoeng Tan, Qun Ying Lin, Hury Ming Chong | 2010-02-02 |
| 7649612 | Phase shifting photolithography system | Qunying Lin, Sia Kim Tan | 2010-01-19 |
| 7645687 | Method to fabricate variable work function gates for FUSI devices | Yung Fu Chong, Dong Kyun Sohn, Chew-Hue Ang, Purakh Raj Vermo | 2010-01-12 |
| 7622403 | Semiconductor processing system with ultra low-K dielectric | Yasri Yudhistira, Johnny Widodo, Bei Chao Zhang | 2009-11-24 |
| 7615427 | Spacer-less low-k dielectric processes | Yong Meng Lee, Young Way Teh, Chung Woh Lai, Wenhe Lin, Khee Yong Lim +3 more | 2009-11-10 |
| 7601607 | Protruded contact and insertion of inter-layer-dielectric material to match damascene hardmask to improve undercut for low-k interconnects | Wuping Liu, Raymond Joy, Beichao Zhang, Boon Meng Seah, Shyam Sundar Pal | 2009-10-13 |
| 7585768 | Combined copper plating method to improve gap fill | Xiaomei Bu, Alex See, Fan Zhang, Jane Hui, Tae Jong Lee | 2009-09-08 |
| 7560199 | Polarizing photolithography system | Sia Kim Tan, Qunying Lin, Gek Soon Chua | 2009-07-14 |
| 7556891 | Method and apparatus for contact hole unit cell formation | Soon Yoeng Tan, Sia Kim Tan, Qunying Lin, Huey Ming Chong | 2009-07-07 |
| 7528445 | Wing gate transistor for integrated circuits | Timothy Phua, Kheng Chok Tee | 2009-05-05 |
| 7524755 | Entire encapsulation of Cu interconnects using self-aligned CuSiN film | Johnny Widodo, Bei Chao Zhang, Tong Qing Chen, Yong Kong Siew, Fan Zhang +2 more | 2009-04-28 |
| 7479425 | Method for forming high-K charge storage device | Chew Hoe Ang, Dong Kyun Sohn | 2009-01-20 |
| 7445978 | Method to remove spacer after salicidation to enhance contact etch stop liner stress on MOS | Young Way Teh, Yong Meng Lee, Chung Woh Lai, Wenhe Lin, Khee Yong Lim +3 more | 2008-11-04 |
| 7445874 | Method to resolve line end distortion for alternating phase shift mask | Sia Kim Tan, Qunying Lin | 2008-11-04 |
| 7421676 | System and method for phase shift assignment | Sia Kim Tan, Qunying Lin | 2008-09-02 |
| 7384714 | Anti-reflective sidewall coated alternating phase shift mask and fabrication method | Sia Kim Tan, Qunying Lin | 2008-06-10 |
| 7338886 | Implantation-less approach to fabricating strained semiconductor on isolation wafers | Jinping Liu, Dong Kyun Sohn | 2008-03-04 |
| 7332422 | Method for CuO reduction by using two step nitrogen oxygen and reducing plasma treatment | Wei Lu, Loh Nah Luona Goh | 2008-02-19 |
| 7326609 | Semiconductor device and fabrication method | Purakh Raj Verma, Dong Kyun Sohn, Guowei Zhang, Chew Hoe Ang, Yun Ling Tan +3 more | 2008-02-05 |
| 7323408 | Metal barrier cap fabrication by polymer lift-off | Beichao Zhang, Wuping Liu | 2008-01-29 |
| 7276440 | Method of fabrication of a die oxide ring | Fan Zhang, Bei Chao Zhang, Wuping Liu, Kho Liep Chok, Tae Jong Lee +2 more | 2007-10-02 |
| 7271110 | High density plasma and bias RF power process to make stable FSG with less free F and SiN with less H to enhance the FSG/SiN integration reliability | Wei Lu | 2007-09-18 |
| 7256084 | Composite stress spacer | Khee Yong Lim, Wenhe Lin, Chung Woh Lai, Yong Meng Lee, Young Way Teh +3 more | 2007-08-14 |
| 7256112 | Laser activation of implanted contact plug for memory bitline fabrication | Yung Fu Chong, Dong Kyun Sohn | 2007-08-14 |