Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9673111 | Methods for extreme ultraviolet mask defect mitigation by multi-patterning | Tan Soon Yoeng | 2017-06-06 |
| 9395621 | Pellicles and devices comprising a photomask and the pellicle | Soon Yoeng Tan, Ngar Chen Stella Lau, Sia Kim Tan | 2016-07-19 |
| 9286435 | System and methods for OPC model accuracy management and disposition | Yong Cheng, Andrew Khoh, Yee Mei Foong | 2016-03-15 |
| 9257277 | Methods for extreme ultraviolet mask defect mitigation by multi-patterning | Tan Soon Yoeng | 2016-02-09 |
| 9122160 | Method and apparatus for performing optical proximity and photomask correction | Yi Zou, Wei-Long Wang, Byoung Il Choi | 2015-09-01 |
| 9053269 | System and methods for OPC model accuracy management and disposition | Yong Cheng, Andrew Khoh, Yee Mei Foong | 2015-06-09 |
| 8898597 | Etch failure prediction based on wafer resist top loss | Qing Yang, Shyue Fong Quek, Yee Mei Foong, Dong-Qing Zhang, Yun Tang | 2014-11-25 |
| 8450046 | Methods for enhancing photolithography patterning | Moh Lung Ling, Qunying Lin, Cho Jui Tay, Chenggen Quan | 2013-05-28 |
| 8413083 | Mask system employing substantially circular optical proximity correction target and method of manufacture thereof | Sia Kim Tan, Kwee Liang Yeo, Ryan Khoon Khye Chong, Moh Lung Ling | 2013-04-02 |
| 8034543 | Angled-wedge chrome-face wall for intensity balance of alternating phase shift mask | Sia Kim Tan, Qunying Lin, Cho Jui Tay, Chenggen Quan | 2011-10-11 |
| 7923180 | Cross technology reticles | Sia Kim Tan, Guoxiang Ning, Soon Yoeng Tan, Byoung Il Choi, Jason Phua | 2011-04-12 |
| 7866224 | Monitoring structure | Sia Kim Tan, Qun Ying Lin, Martin Yeo | 2011-01-11 |
| 7867698 | Reticle system for manufacturing integrated circuit systems | Sia Kim Tan, Byoung Il Choi, Ryan Khoon Khye Chong, Martin Yeo | 2011-01-11 |
| 7674562 | Angled-wedge chrome-face wall for intensity balance of alternating phase shift mask | Sia Kim Tan, Qunying Lin, Cho Jui Tay, Chenggen Quan | 2010-03-09 |
| 7560199 | Polarizing photolithography system | Sia Kim Tan, Qunying Lin, Liang-Choo Hsia | 2009-07-14 |