Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8450046 | Methods for enhancing photolithography patterning | Moh Lung Ling, Gek Soon Chua, Cho Jui Tay, Chenggen Quan | 2013-05-28 |
| 8048588 | Method and apparatus for removing radiation side lobes | Sia Kim Tan, Soon Yoeng Tan, Huey Ming Chong, Liang-Choo Hsia | 2011-11-01 |
| 8034543 | Angled-wedge chrome-face wall for intensity balance of alternating phase shift mask | Gek Soon Chua, Sia Kim Tan, Cho Jui Tay, Chenggen Quan | 2011-10-11 |
| 8003311 | Integrated circuit system employing multiple exposure dummy patterning technology | Sia Kim Tan, Soo Muay Goh, Martin Yeo | 2011-08-23 |
| 7926000 | Integrated circuit system employing dipole multiple exposure | Sia Kim Tan | 2011-04-12 |
| 7836420 | Integrated circuit system with assist feature | Sia Kim Tan, Andrew Khoh | 2010-11-16 |
| 7674562 | Angled-wedge chrome-face wall for intensity balance of alternating phase shift mask | Gek Soon Chua, Sia Kim Tan, Cho Jui Tay, Chenggen Quan | 2010-03-09 |
| 7649612 | Phase shifting photolithography system | Sia Kim Tan, Liang-Choo Hsia | 2010-01-19 |
| 7560199 | Polarizing photolithography system | Sia Kim Tan, Gek Soon Chua, Liang-Choo Hsia | 2009-07-14 |
| 7556891 | Method and apparatus for contact hole unit cell formation | Soon Yoeng Tan, Sia Kim Tan, Huey Ming Chong, Liang-Choo Hsia | 2009-07-07 |
| 7445874 | Method to resolve line end distortion for alternating phase shift mask | Sia Kim Tan, Liang-Choo Hsia | 2008-11-04 |
| 7421676 | System and method for phase shift assignment | Sia Kim Tan, Liang-Choo Hsia | 2008-09-02 |
| 7384714 | Anti-reflective sidewall coated alternating phase shift mask and fabrication method | Sia Kim Tan, Liang-Choo Hsia | 2008-06-10 |