Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8692380 | Integrated circuit system with sub-geometry removal and method of manufacture thereof | Soon Yoeng Tan, Byoung Il Choi, Soo Muay Goh | 2014-04-08 |
| 8293546 | Integrated circuit system with sub-geometry removal and method of manufacture thereof | Soon Yoeng Tan, Byoung Il Choi, Soo Muay Goh | 2012-10-23 |
| 8057968 | Mask and method to pattern chromeless phase lithography contact hole | Sia Kim Tan, Soon Yoeng Tan, Qun Ying Lin, Liang-Choo Hsia | 2011-11-15 |
| 8048588 | Method and apparatus for removing radiation side lobes | Sia Kim Tan, Soon Yoeng Tan, Qunying Lin, Liang-Choo Hsia | 2011-11-01 |
| 7556891 | Method and apparatus for contact hole unit cell formation | Soon Yoeng Tan, Sia Kim Tan, Qunying Lin, Liang-Choo Hsia | 2009-07-07 |
| 7288366 | Method for dual damascene patterning with single exposure using tri-tone phase shift mask | Sia Kim Tan, Qun Ying Lin, Soon Yoeng Tan | 2007-10-30 |
| 7224060 | Integrated circuit with protective moat | Fan Zhang, Kho Liep Chok, Tae Jong Lee, Xiaomei Bu, Meng Luo +4 more | 2007-05-29 |
| 7014962 | Half tone alternating phase shift masks | Qun Ying Lin, Sia Kim Tan, Soon Yoeng Tan | 2006-03-21 |