Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8450046 | Methods for enhancing photolithography patterning | Moh Lung Ling, Gek Soon Chua, Qunying Lin, Chenggen Quan | 2013-05-28 |
| 8034543 | Angled-wedge chrome-face wall for intensity balance of alternating phase shift mask | Gek Soon Chua, Sia Kim Tan, Qunying Lin, Chenggen Quan | 2011-10-11 |
| 7674562 | Angled-wedge chrome-face wall for intensity balance of alternating phase shift mask | Gek Soon Chua, Sia Kim Tan, Qunying Lin, Chenggen Quan | 2010-03-09 |
| 7127949 | Contact pressure sensor and method for manufacturing the same | Ramam Akkipeddi, Christopher Sperring, Siew Lok Toh, Mustafizur Rahman, Soo Jin Chua | 2006-10-31 |