Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9673111 | Methods for extreme ultraviolet mask defect mitigation by multi-patterning | Gek Soon Chua | 2017-06-06 |
| 9257277 | Methods for extreme ultraviolet mask defect mitigation by multi-patterning | Gek Soon Chua | 2016-02-09 |