Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7655388 | Mask and method to pattern chromeless phase lithography contact hole | Sia Kim Tan, Soon Yoeng Tan, Qun Ying Lin, Liang-Choo Hsia | 2010-02-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7655388 | Mask and method to pattern chromeless phase lithography contact hole | Sia Kim Tan, Soon Yoeng Tan, Qun Ying Lin, Liang-Choo Hsia | 2010-02-02 |