Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8987827 | Prevention of faceting in epitaxial source drain transistors | Pietro Montanini, Marta Mottura, Henry K. Utomo | 2015-03-24 |
| 8177993 | Apparatus and methods for cleaning and drying of wafers | Boon Meng Seah, Bei Chao Zhang, Shao Beng Law, John Sudijono, Liang-Choo Hsia | 2012-05-15 |
| 7601607 | Protruded contact and insertion of inter-layer-dielectric material to match damascene hardmask to improve undercut for low-k interconnects | Wuping Liu, Beichao Zhang, Liang-Choo Hsia, Boon Meng Seah, Shyam Sundar Pal | 2009-10-13 |
| 7352064 | Multiple layer resist scheme implementing etch recipe particular to each layer | Nicholas C. M. Fuller, Timothy J. Dalton, Yi-Hsiung Lin, Chun Hui Low | 2008-04-01 |
| 6730573 | MIM and metal resistor formation at CU beol using only one extra mask | Chit Hwei Ng, Chaw Sing Ho, Lup San Leong, Shao Kai, Sanford Chu +1 more | 2004-05-04 |
| 6548413 | Method to reduce microloading in metal etching | Paul Ho, Thomas Schulue, Wai Lok Lee, Ramasamy Chockalingam, Ba Tuan Pham +1 more | 2003-04-15 |
| 6271115 | Post metal etch photoresist strip method | Wen-Jun Liu, Simon Chooi, Mei Sheng Zhou | 2001-08-07 |