TS

Thomas Schulue

CM Chartered Semiconductor Manufacturing: 1 patents #419 of 840Top 50%
Overall (All Time): #3,508,334 of 4,157,543Top 85%
1
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
6548413 Method to reduce microloading in metal etching Paul Ho, Raymond Joy, Wai Lok Lee, Ramasamy Chockalingam, Ba Tuan Pham +1 more 2003-04-15