Issued Patents All Time
Showing 101–125 of 140 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9472435 | Tunable temperature controlled substrate support assembly | Steven E. Babayan, Konstantin Makhratchev, Zhiqiang Guo, Phillip R. Sommer, Dan Marohl | 2016-10-18 |
| 9472410 | Pixelated capacitance controlled ESC | Reza Sadjadi, Wendell Glen Boyd, Jr., Maxim Mikhailovich Noginov | 2016-10-18 |
| 9404176 | Substrate support with radio frequency (RF) return path | Ryan Edwin Hanson | 2016-08-02 |
| 9196514 | Electrostatic chuck with variable pixilated heating | Wendell Glenn Boyd, Jr. | 2015-11-24 |
| 8971009 | Electrostatic chuck with temperature control | Steven V. Sansoni, Cheng-Hsiung Tsai | 2015-03-03 |
| 8852348 | Heat exchange pedestal with coating of diamond-like material | Kurt J. Ahmann, Matthew Tsai, Steve Sansoni | 2014-10-07 |
| 8559159 | Electrostatic chuck and methods of use thereof | Shambhu N. Roy, Martin Lee Riker, Keith A. Miller, Steven V. Sansoni | 2013-10-15 |
| 8435379 | Substrate cleaning chamber and cleaning and conditioning methods | Vineet Haresh Mehta, Karl M. Brown, John Pipitone, Daniel J. Hoffman, Steven C. Shannon +1 more | 2013-05-07 |
| 8390980 | Electrostatic chuck assembly | Steven V. Sansoni, Cheng-Hsiung Tsai, Shambhu N. Roy, Karl M. Brown, Hari Ponnekanti | 2013-03-05 |
| 8320099 | Electrostatic chuck electrical balancing circuit repair | Robert T. Hirahara | 2012-11-27 |
| 8114477 | Cleaning of a substrate support | — | 2012-02-14 |
| 8064185 | Electrostatic chuck electrical balancing circuit repair | Robert T. Hirahara | 2011-11-22 |
| 7824498 | Coating for reducing contamination of substrates during processing | Kurt J. Ahmann, Matthew Tsai, Steve Sansoni | 2010-11-02 |
| 7655316 | Cleaning of a substrate support | — | 2010-02-02 |
| 7589950 | Detachable electrostatic chuck having sealing assembly | Cheng-Tsiung Tsai, Steven V. Sansoni | 2009-09-15 |
| 6853533 | Full area temperature controlled electrostatic chuck and method of fabricating same | — | 2005-02-08 |
| 6743473 | Chemical vapor deposition of barriers from novel precursors | Gilbert Hausmann, Jagadish Kalyanam | 2004-06-01 |
| 6547934 | Reduction of metal oxide in a dual frequency etch chamber | Barney M. Cohen, Gilbert Hausmann, Zheng Xu | 2003-04-15 |
| 6535372 | Controlled resistivity boron nitride electrostatic chuck apparatus for retaining a semiconductor wafer and method of fabricating the same | Chandra Deshpandey | 2003-03-18 |
| 6503368 | Substrate support having bonded sections and method | Arnold Kholodenko, Shamouil Shamouilian, You Wang, Wing Cheng, Alexander Veytser | 2003-01-07 |
| 6475902 | Chemical vapor deposition of niobium barriers for copper metallization | Gilbert Hausmann, Jagadish Kalyanam | 2002-11-05 |
| 6395157 | Method and apparatus for sputter etch conditioning a ceramic body | Nitin Khurana, Vince Burkhart, Steve Sansoni, Eugene Tzou | 2002-05-28 |
| 6246567 | Apparatus for igniting a plasma in a plasma processing chamber | — | 2001-06-12 |
| 6224035 | Staple removing device | Dttatraya P. Parkhe | 2001-05-01 |
| 6217655 | Stand-off pad for supporting a wafer on a substrate support chuck | Ananda H. Kumar, Shamouil Shamouilian, Hyman J. Levinstein | 2001-04-17 |