Issued Patents All Time
Showing 126–140 of 140 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6190037 | Non-intrusive, on-the-fly (OTF) temperature measurement and monitoring system | Ashok Das, Nety M. Krishna, Marc Schweitzer, Nalin Patadia, Wei Yang +3 more | 2001-02-20 |
| 6125789 | Increasing the sensitivity of an in-situ particle monitor | Anand Gupta | 2000-10-03 |
| 6117246 | Conductive polymer pad for supporting a workpiece upon a workpiece support surface of an electrostatic chuck | Gilbert Hausmann | 2000-09-12 |
| 6057244 | Method for improved sputter etch processing | Gilbert Hausmann, Chia-Ao William LU, Michael S. Jackson | 2000-05-02 |
| 6033482 | Method for igniting a plasma in a plasma processing chamber | — | 2000-03-07 |
| 5908334 | Electrical connector for power transmission in an electrostatic chuck | Aihua Chen, Sergio Edelstein | 1999-06-01 |
| 5909355 | Ceramic electrostatic chuck and method of fabricating same | — | 1999-06-01 |
| 5903428 | Hybrid Johnsen-Rahbek electrostatic chuck having highly resistive mesas separating the chuck from a wafer supported thereupon and method of fabricating same | Dennis S. Grimard, Hyman J. Levinstein, Fusen Chen, Michael G. Chafin | 1999-05-11 |
| 5886865 | Method and apparatus for predicting failure of an eletrostatic chuck | Steven V. Sansoni, Vincent E. Burkhart | 1999-03-23 |
| 5861086 | Method and apparatus for sputter etch conditioning a ceramic body | Nitin Khurana, Vince Burkhart, Steve Sansoni, Eugene Tzou | 1999-01-19 |
| 5796074 | Wafer heater assembly | Sergio Edelstein, Steven Chen | 1998-08-18 |
| 5757537 | Electrochromic devices and methods | Frank Ellis, John E. Van Dine | 1998-05-26 |
| 5748435 | Apparatus for controlling backside gas pressure beneath a semiconductor wafer | — | 1998-05-05 |
| 5691876 | High temperature polyimide electrostatic chuck | Aihua Chen, Sergio Edelstein | 1997-11-25 |
| 5650052 | Variable cell size collimator | Sergio Edelstein, Nitin Khurana, Keiji Miyamoto, Roderick C. Mosely, William J. Murphy +2 more | 1997-07-22 |