Issued Patents All Time
Showing 76–100 of 140 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10008404 | Electrostatic chuck assembly for high temperature processes | — | 2018-06-26 |
| 10008399 | Electrostatic puck assembly with metal bonded backing plate for high temperature processes | — | 2018-06-26 |
| 9991148 | Electrostatic chuck having thermally isolated zones with minimal crosstalk | Konstantin Makhratchev, Jason C. Della Rosa, Hamid Noorbakhsh, Brad L. Mays, Douglas A. Buchberger, Jr. | 2018-06-05 |
| 9986598 | Temperature control apparatus including groove-routed optical fiber heating, substrate temperature control systems, electronic device processing systems, and processing methods | Matthew J. Busche, Wendell Glenn Boyd, Jr., Dmitry A. Dzilno, Michael R. Rice, Leon Volfovski | 2018-05-29 |
| 9984911 | Electrostatic chuck design for high temperature RF applications | Ryan Edwin Hanson, Manjunatha Koppa, John C. Forster, Keith A. Miller | 2018-05-29 |
| 9969022 | Vacuum process chamber component and methods of making | — | 2018-05-15 |
| 9887121 | Protective cover for electrostatic chuck | — | 2018-02-06 |
| 9875923 | Control systems employing deflection sensors to control clamping forces applied by electrostatic chucks, and related methods | Wendell Glenn Boyd, Jr., Matthew J. Busche, Konstantin Makhratchev, Masanori Ono, Senh Thach | 2018-01-23 |
| 9865489 | Substrate support chuck cooling for deposition chamber | Brian T. West, Robert T. Hirahara, Dan DEYO | 2018-01-09 |
| 9853579 | Rotatable heated electrostatic chuck | Anantha K. Subramani, Ashish Goel, Wei Wang, Bharath Swaminathan, Xiaoxiong Yuan | 2017-12-26 |
| 9831111 | Apparatus and method for measurement of the thermal performance of an electrostatic wafer chuck | Matthew J. Busche, Michael R. Rice | 2017-11-28 |
| 9805965 | Pixelated capacitance controlled ESC | Reza Sadjadi, Wendell Glen Boyd, Jr., Maxim Mikhailovich Noginov | 2017-10-31 |
| 9753463 | Increasing the gas efficiency for an electrostatic chuck | — | 2017-09-05 |
| 9698041 | Substrate temperature control apparatus including optical fiber heating, substrate temperature control systems, electronic device processing systems, and methods | Matthew J. Busche, Wendell Glenn Boyd, Jr., Michael R. Rice, Leon Volfovski | 2017-07-04 |
| 9685356 | Substrate support assembly having metal bonded protective layer | Kadthala Ramaya Narendrnath | 2017-06-20 |
| 9669653 | Electrostatic chuck refurbishment | Kadthala Ramaya Narendrnath | 2017-06-06 |
| 9666466 | Electrostatic chuck having thermally isolated zones with minimal crosstalk | Konstantin Makhratchev, Jason C. Della Rosa, Hamid Noorbakhsh, Brad L. Mays, Douglas A. Buchberger, Jr. | 2017-05-30 |
| 9668373 | Substrate support chuck cooling for deposition chamber | Brian T. West, Robert T. Hirahara, Dan DEYO | 2017-05-30 |
| 9666467 | Detachable high-temperature electrostatic chuck assembly | — | 2017-05-30 |
| 9622375 | Electrostatic chuck with external flow adjustments for improved temperature distribution | Matthew J. Busche, Wendell Glenn Boyd, Jr., Senh Thach, Konstantin Makhratchev, Masanori Ono | 2017-04-11 |
| 9608549 | Electrostatic chuck | Steven V. Sansoni, Cheng-Hsiung Tsai | 2017-03-28 |
| 9580806 | Method of processing a substrate support assembly | Wendell Glen Boyd, Jr., Sehn Thach | 2017-02-28 |
| 9558981 | Control systems employing deflection sensors to control clamping forces applied by electrostatic chucks, and related methods | Wendell Glenn Boyd, Jr., Matthew J. Busche, Konstantin Makhratchev, Masanori Ono, Senh Thach | 2017-01-31 |
| 9536769 | Pixelated capacitance controlled ESC | Reza Sadjadi, Wendell Glen Boyd, Jr., Maxim Mikhailovich Noginov | 2017-01-03 |
| 9520315 | Electrostatic chuck with internal flow adjustments for improved temperature distribution | Matthew J. Busche, Wendell Glenn Boyd, Jr., Senh Thach, Konstantin Makhratchev, Masanori Ono | 2016-12-13 |