Issued Patents All Time
Showing 26–50 of 140 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11769684 | Wafer heater with backside and integrated bevel purge | Tejas Ulavi, Naveen Kumar Nagaraja, Sanjeev Baluja, Surajit Kumar, Dhritiman Subha Kashyap +1 more | 2023-09-26 |
| 11769683 | Chamber component with protective ceramic coating containing yttrium, aluminum and oxygen | Wendell Glenn Boyd, Jr., Teng-Fang Kuo, Zhenwen Ding | 2023-09-26 |
| 11747834 | Increasing the gas efficiency for an electrostatic chuck | — | 2023-09-05 |
| 11742225 | Electrostatic puck assembly with metal bonded backing plate | — | 2023-08-29 |
| 11676849 | Substrate carrier | — | 2023-06-13 |
| 11640917 | Ground electrode formed in an electrostatic chuck for a plasma processing chamber | Michael R. Rice | 2023-05-02 |
| 11557500 | High temperature heated support pedestal in a dual load lock configuration | — | 2023-01-17 |
| 11532497 | High power electrostatic chuck design with radio frequency coupling | Jaeyong Cho, Haitao Wang, Kartik Ramaswamy, Chunlei Zhang | 2022-12-20 |
| 11527429 | Substrate support assembly for high temperature processes | — | 2022-12-13 |
| 11482444 | High temperature micro-zone electrostatic chuck | — | 2022-10-25 |
| 11476146 | Substrate support assembly with deposited surface features | Wendell Glenn Boyd, Jr., Teng-Fang Kuo, Zhenwen Ding | 2022-10-18 |
| 11450546 | Semiconductor substrate support with internal channels | — | 2022-09-20 |
| 11410869 | Electrostatic chuck with differentiated ceramics | — | 2022-08-09 |
| 11265971 | Sensor system for multi-zone electrostatic chuck | — | 2022-03-01 |
| 11192323 | Bonding structure of e chuck to aluminum base configuration | Roger Alan Lindley | 2021-12-07 |
| 11179965 | Electrostatic chuck optimized for refurbishment | Kadthala Ramaya Narendrnath | 2021-11-23 |
| 11158526 | Temperature controlled substrate support assembly | Konstantin Makhratchev, Masanori Ono, Zhiqiang Guo | 2021-10-26 |
| 11127619 | Workpiece carrier for high power with enhanced edge sealing | Kartik Ramaswamy, Chunlei Zhang, Haitao Wang, Jaeyong Cho | 2021-09-21 |
| 11088005 | Electrostatic chuck having thermally isolated zones with minimal crosstalk | Konstantin Makhratchev, Jason C. Della Rosa, Hamid Noobakhsh, Brad L. Mays, Douglas A. Buchberger, Jr. | 2021-08-10 |
| 11043360 | Gas distribution plate assembly for high power plasma etch processes | James D. Carducci, Kenneth S. Collins, Kartik Ramaswamy, Michael R. Rice, Richard Fovell | 2021-06-22 |
| 10973088 | Optically heated substrate support assembly with removable optical fibers | — | 2021-04-06 |
| 10957572 | Multi-zone gasket for substrate support assembly | — | 2021-03-23 |
| 10904996 | Substrate support with electrically floating power supply | Travis Koh, Haitao Wang, Philip Allan Kraus, Daniel Distaso, Christopher A. Rowland +2 more | 2021-01-26 |
| 10903094 | Electrostatic puck assembly with metal bonded backing plate for high temperature processes | — | 2021-01-26 |
| 10872800 | Electrostatic chuck assembly for high temperature processes | — | 2020-12-22 |