Issued Patents All Time
Showing 51–75 of 140 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D904640 | Substrate carrier | Fred Eric Ruhland, Sumit Subhash Patankar, Daniel Lee Diehl, Mingwei Zhu, Hiroyuki Takahama +1 more | 2020-12-08 |
| 10790180 | Electrostatic chuck with variable pixelated magnetic field | Chih-Hsun Hsu, Tza-Jing Gung, Benjamin Schwarz, Shahid Rauf, Ankur Agarwal +2 more | 2020-09-29 |
| 10770270 | High power electrostatic chuck with aperture-reducing plug in a gas hole | Jaeyong Cho, Haitao Wang, Kartik Ramaswamy, Chunlei Zhang | 2020-09-08 |
| 10736182 | Apparatus, systems, and methods for temperature control of substrates using embedded fiber optics and epoxy optical diffusers | Matthew J. Busche, Wendell Glenn Boyd, Jr., Todd Egan, Gregory L. Kirk, Michael R. Rice +1 more | 2020-08-04 |
| 10688750 | Bonding structure of E chuck to aluminum base configuration | Roger Alan Lindley | 2020-06-23 |
| 10685861 | Direct optical heating of substrates through optical guide | — | 2020-06-16 |
| 10679885 | Substrate support assembly with deposited surface features | Wendell Glenn Boyd, Jr., Teng-Fang Kuo, Zhenwen Ding | 2020-06-09 |
| 10622229 | Electrostatic chuck with independent zone cooling and reduced crosstalk | Konstantin Makhratchev | 2020-04-14 |
| 10582570 | Sensor system for multi-zone electrostatic chuck | — | 2020-03-03 |
| 10557202 | Method of processing a substrate support assembly | Wendell Glen Boyd, Jr., Senh Thach | 2020-02-11 |
| 10541171 | Protective cover for electrostatic chuck | — | 2020-01-21 |
| 10535544 | Tunable temperature controlled substrate support assembly | Steven E. Babayan, Konstantin Makhratchev, Zhiqiang Guo, Phillip R. Sommer, Dan Marohl | 2020-01-14 |
| 10497605 | Substrate carrier | — | 2019-12-03 |
| 10460916 | Real time monitoring with closed loop chucking force control | Wendell Glenn Boyd, Jr., Matthew J. Busche, Konstantin Makhratchev, Masanori Ono, Senh Thach | 2019-10-29 |
| 10460968 | Electrostatic chuck with variable pixelated magnetic field | Chih-Hsun Hsu, Tza-Jing Gung, Benjamin Schwarz, Shahid Rauf, Ankur Agarwal +2 more | 2019-10-29 |
| 10403534 | Pixilated cooling, temperature controlled substrate support assembly | Wendell Glenn Boyd, Jr., Matthew J. Busche, Konstantin Makhratchev, Masanori Ono, Senh Thach | 2019-09-03 |
| 10395964 | Apparatus and method for measurement of the thermal performance of an electrostatic wafer chuck | Matthew J. Busche, Michael R. Rice | 2019-08-27 |
| 10304715 | Electrostatic chuck having thermally isolated zones with minimal crosstalk | Konstantin Makhratchev, Jason Della Rosa, Hamid Noorbakhsh, Brad L. Mays, Douglas A. Buchberger, Jr. | 2019-05-28 |
| 10249526 | Substrate support assembly for high temperature processes | — | 2019-04-02 |
| 10177023 | Protective cover for electrostatic chuck | — | 2019-01-08 |
| 10121688 | Electrostatic chuck with external flow adjustments for improved temperature distribution | Matthew J. Busche, Wendell Glenn Boyd, Jr., Senh Thach, Konstantin Makhratchev, Masanori Ono | 2018-11-06 |
| 10079165 | Electrostatic chuck with independent zone cooling and reduced crosstalk | Konstantin Makhratchev | 2018-09-18 |
| 10053778 | Cooling pedestal with coating of diamond-like carbon | Kurt J. Ahmann, Matthew Tsai, Steve Sansoni | 2018-08-21 |
| 10056284 | Electrostatic chuck optimized for refurbishment | Kadthala Ramaya Narendrnath | 2018-08-21 |
| 10020218 | Substrate support assembly with deposited surface features | Wendell Glenn Boyd, Jr., Teng-Fang Kuo, Zhenwen Ding | 2018-07-10 |