Issued Patents All Time
Showing 26–50 of 64 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11446711 | Steam treatment stations for chemical mechanical polishing system | Haosheng Wu, Jianshe Tang, Hari Soundararajan, Hui Chen, Chih Chung Chou +2 more | 2022-09-20 |
| 11077536 | Slurry distribution device for chemical mechanical polishing | Yen-Chu Yang, Stephen Jew, Jianshe Tang, Haosheng Wu, Paul D. Butterfield +2 more | 2021-08-03 |
| 10967483 | Slurry distribution device for chemical mechanical polishing | Yen-Chu Yang, Stephen Jew, Jianshe Tang, Haosheng Wu, Paul D. Butterfield +2 more | 2021-04-06 |
| 10562147 | Polishing system with annular platen or polishing pad for substrate monitoring | Paul D. Butterfield, Thomas H. Osterheld, Jeonghoon Oh, Steven M. Zuniga, Fred C. Redeker | 2020-02-18 |
| 10076817 | Orbital polishing with small pad | Hung Chih Chen, Paul D. Butterfield, Jay Gurusamy, Jason Garcheung Fung, Jimin Zhang +1 more | 2018-09-18 |
| 9873179 | Carrier for small pad for chemical mechanical polishing | Hui Chen, Steven M. Zuniga, Hung Chih Chen, Eric Lau, Garrett H. Sin | 2018-01-23 |
| 9862070 | Systems and methods for substrate polishing end point detection using improved friction measurement | Hung Chih Chen, Lakshmanan Karuppiah, Paul D. Butterfield, Erik S. Rondum | 2018-01-09 |
| 9808906 | Polishing system with front side pressure control | Takashi Fujikawa, Hung Chih Chen, Paul D. Butterfield | 2017-11-07 |
| 9687960 | Polishing pad cleaning systems employing fluid outlets oriented to direct fluid under spray bodies and towards inlet ports, and related methods | Paul D. Butterfield, Bum Jick Kim | 2017-06-27 |
| 9452506 | Vacuum cleaning systems for polishing pads, and related methods | Paul D. Butterfield, Bum Jick Kim | 2016-09-27 |
| 9358658 | Polishing system with front side pressure control | Takashi Fujikawa, Hung Chih Chen, Paul D. Butterfield | 2016-06-07 |
| 9308623 | Multi-disk chemical mechanical polishing pad conditioners and methods | Hung Chih Chen, Jason Garcheung Fung, Matthew A. Gallelli, Paul D. Butterfield, Kevin Chou | 2016-04-12 |
| 9254547 | Side pad design for edge pedestal | Yin Yuan, Hung Chih Chen | 2016-02-09 |
| 9238293 | Polishing pad edge extension | Chih-Hung Chen, Stan Tsai | 2016-01-19 |
| 9138860 | Closed-loop control for improved polishing pad profiles | Sivakumar Dhandapani, Jun Qian, Christopher Cocca, Jason Garcheung Fung, Charles C. Garretson +2 more | 2015-09-22 |
| 9061394 | Systems and methods for substrate polishing end point detection using improved friction measurement | Hung Chih Chen, Lakshmanan Karuppiah, Paul D. Butterfield, Erik S. Rondum | 2015-06-23 |
| 8550879 | Polishing pad conditioner | Hung Chih Chen, Sen-Hou Ko | 2013-10-08 |
| 8337279 | Closed-loop control for effective pad conditioning | Sivakumar Dhandapani, Stan Tsai, Daxin Mao, Sameer Deshpande, Gregory E. Menk +4 more | 2012-12-25 |
| 8221193 | Closed loop control of pad profile based on metrology feedback | Hung Chih Chen, Stan Tsai, Yuchun Wang | 2012-07-17 |
| 8142260 | Methods and apparatus for removal of films and flakes from the edge of both sides of a substrate using backing pads | Eashwer Chandra Vidhya Sagar Kollata, Zhenhua Zhang, Paul D. Butterfield, Sen-Hou Ko, Antoine P. Manens +2 more | 2012-03-27 |
| 8096852 | In-situ performance prediction of pad conditioning disk by closed loop torque monitoring | Sameer Deshpande, Hung Chih Chen, Roy C. Nangoy, Stan Tsai | 2012-01-17 |
| 8066552 | Multi-layer polishing pad for low-pressure polishing | Alain Duboust, Wei Lu, Siew Neo, Yan Wang, Antoine P. Manens +1 more | 2011-11-29 |
| 7963826 | Apparatus and methods for conditioning a polishing pad | Roy C. Nangoy, Donald Olgado, Hung Chih Chen, Gerald Alonzo | 2011-06-21 |
| 7678245 | Method and apparatus for electrochemical mechanical processing | Yan Wang, Siew Neo, Feng Q. Liu, Stan Tsai, Yongqi Hu +9 more | 2010-03-16 |
| 7654885 | Multi-layer polishing pad | Stan Tsai, Liang-Yuh Chen | 2010-02-02 |