Issued Patents All Time
Showing 51–64 of 64 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7597608 | Pad conditioning device with flexible media mount | Steven M. Zuniga | 2009-10-06 |
| 7344431 | Pad assembly for electrochemical mechanical processing | Yongqi Hu, Stan Tsai, Yan Wang, Feng Q. Liu, Liang-Yuh Chen | 2008-03-18 |
| 7285036 | Pad assembly for electrochemical mechanical polishing | Stan Tsai, Donald Olgado, Liang-Yuh Chen, Alain Duboust, Ralph Wadensweiler | 2007-10-23 |
| 7137868 | Pad assembly for electrochemical mechanical processing | Stan Tsai, Donald Olgado, Liang-Yuh Chen, Alain Duboust, Ralph Wadensweiler | 2006-11-21 |
| 7077721 | Pad assembly for electrochemical mechanical processing | Yongqi Hu, Stan Tsai, Yan Wang, Feng Q. Liu, Liang-Yuh Chen | 2006-07-18 |
| 7029365 | Pad assembly for electrochemical mechanical processing | Stan Tsai, Donald Olgado, Liang-Yuh Chen, Alain Duboust, Ralph Wadensweiler | 2006-04-18 |
| 6776693 | Method and apparatus for face-up substrate polishing | Alain Duboust, Liang-Yuh Chen, Yan Wang, Siew Neo, Lizhong Sun +1 more | 2004-08-17 |
| 6322429 | Conditioner assembly and a conditioner back support for a chemical mechanical polishing apparatus | Ethan C. Wilson, James A. Allen, David E. Weldon, Gregory C. Lee, Linh X. Can +2 more | 2001-11-27 |
| 6315857 | Polishing pad shaping and patterning | Tsungnan Cheng, Ethan C. Wilson, Gregory C. Lee, Huey-Ming Tzeng, David E. Weldon +3 more | 2001-11-13 |
| 6159083 | Polishing head for a chemical mechanical polishing apparatus | Gregory A. Appel, Charles J. Regan, David E. Weldon, Gregory C. Lee | 2000-12-12 |
| 6080040 | Wafer carrier head with inflatable bladder and attack angle control for polishing | Gregory A. Appel, Ethan C. Wilson | 2000-06-27 |
| 6042457 | Conditioner assembly for a chemical mechanical polishing apparatus | Ethan C. Wilson, James A. Allen, David E. Weldon, Gregory C. Lee, Linh X. Can +2 more | 2000-03-28 |
| 6000997 | Temperature regulation in a CMP process | Shu-Hsin Kao, Huey-Ming Tzeng, Gregory C. Lee, Greg Simon, Harry W. Lee, Jr. +5 more | 1999-12-14 |
| 5980368 | Polishing tool having a sealed fluid chamber for support of polishing pad | Shu-Hsin Kao, David E. Weldon | 1999-11-09 |