Issued Patents 2023
Showing 26–46 of 46 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11681234 | Mask for attracting charged particles and method for using the same | Yen-An Chen, Heng-Hsin Liu, Tzung-Chi Fu, Han-Lung Chang | 2023-06-20 |
| 11680958 | Particle image velocimetry of extreme ultraviolet lithography systems | En Hao Lai, Chi-Ming Yang, Shang-Chieh Chien, Po-Chung Cheng | 2023-06-20 |
| 11675272 | Method and apparatus for mitigating contamination | Chih-Ping YEN, Yen-Shuo Su, Chieh Hsieh, Shang-Chieh Chien, Chun-Lin Chang +1 more | 2023-06-13 |
| 11662668 | Lithography contamination control | Chieh Hsieh, Tai-Yu Chen, Cho-Ying Lin, Shang-Chieh Chien, Heng-Hsin Liu | 2023-05-30 |
| 11657492 | Reticle backside inspection method | Zi-Wen Chen, Po-Chung Cheng, Chih-Tsung Shih, Shih-Chang Shih | 2023-05-23 |
| 11650512 | Reticle cleaning device and method of use | Che-Chang Hsu, Sheng-Kang Yu, Shang-Chieh Chien, Heng-Hsin Liu | 2023-05-16 |
| 11650508 | Plasma position control for extreme ultraviolet lithography light sources | Ssu-Yu Chen, Hsin-Feng Chen, Chi-Ming Yang | 2023-05-16 |
| 11647578 | Lithography thermal control | Tai-Yu Chen, Cho-Ying Lin, Sagar Deepak Khivsara, Hsiang Chen, Chieh Hsieh +5 more | 2023-05-09 |
| 11644759 | Droplet generator and method of servicing extreme ultraviolet radiation source apparatus | Yen-Hsun Chen, Ming-Hsun Tsai, Shao-Hua Wang, Han-Lung Chang, Chia-Chen Chen | 2023-05-09 |
| 11632849 | Method and apparatus for mitigating contamination | Chieh Hsieh, Tai-Yu Chen, Hung-Jung Hsu, Cho-Ying Lin, Shang-Chieh Chien +1 more | 2023-04-18 |
| 11630393 | Apparatus and method for generating extreme ultraviolet radiation | Chieh Hsieh, Kuan-Hung Chen, Chun-Chia Hsu, Shang-Chieh Chien, Bo-Tsun Liu +1 more | 2023-04-18 |
| 11617255 | Droplet generator and method of servicing extreme ultraviolet imaging tool | Wei-Chih Lai, Han-Lung Chang, Bo-Tsun Liu, Po-Chung Cheng | 2023-03-28 |
| 11605477 | EUV lithography apparatus | Cheng-Hung Tsai, Sheng-Kang Yu, Shang-Chieh Chien, Heng-Hsin Liu | 2023-03-14 |
| 11599030 | Droplet catcher, droplet catcher system of EUV lithography apparatus, and maintenance method of the EUV lithography apparatus | Shih-Yu Tu, Po-Chung Cheng, Hsiao-Lun Chang, Han-Lung Chang | 2023-03-07 |
| 11594528 | Layout modification method for exposure manufacturing process | Hung-Wen Cho, Fu-Jye Liang, Chun-Kuang Chen, Chih-Tsung Shih, Po-Chung Cheng +1 more | 2023-02-28 |
| 11588293 | Methods and systems for aligning master oscillator power amplifier systems | Chun-Lin Chang, Henry Tong Yee-Shian, Alan Tu, Han-Lung Chang, Tzung-Chi Fu +2 more | 2023-02-21 |
| 11576250 | Semiconductor processing tool and methods of operation | Cheng-Hao LAI, Ming-Hsun Tsai, Hsin-Feng Chen, Wei-Shin Cheng, Yu-Kuang SUN +3 more | 2023-02-07 |
| 11567415 | Inspection system for extreme ultraviolet (EUV) light source | Chiao-Hua Cheng, Shang-Chieh Chien, Heng-Hsin Liu, Sheng-Kang Yu | 2023-01-31 |
| 11556065 | Wafer stage and method thereof | Yu-Huan Chen, Yu-Chih Huang, Ya-An PENG, Shang-Chieh Chien, Heng-Hsin Liu | 2023-01-17 |
| 11550228 | System and apparatus for lithography in semiconductor fabrication | Cheng-Kuan Wu, Po-Chung Cheng, Chih-Tsung Shih | 2023-01-10 |
| 11553581 | Radiation source apparatus and method for using the same | Chiao-Hua Cheng, Hsin-Feng Chen, Yu-Fa LO, Yu-Kuang SUN, Wei-Shin Cheng +7 more | 2023-01-10 |