Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11728675 | Power supply apparatus | Kai-Wei Hu, Chia-Tse Lee, Lei-Chung Hsing | 2023-08-15 |
| 11698591 | System and method of discharging an EUV mask | Yi-Zhen Chen, Jhan-Hong YEH, Tzung-Chi Fu, Han-Lung Chang, Li-Jui Chen | 2023-07-11 |
| 11687011 | Reticle carrier and associated methods | Yi-Zhen Chen, Jhan-Hong YEH, Han-Lung Chang, Tzung-Chi Fu, Li-Jui Chen | 2023-06-27 |
| 11644759 | Droplet generator and method of servicing extreme ultraviolet radiation source apparatus | Ming-Hsun Tsai, Shao-Hua Wang, Han-Lung Chang, Li-Jui Chen, Chia-Chen Chen | 2023-05-09 |