Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11803129 | Semiconductor processing tool and methods of operation | Kueilin HO, Cheng-Wei Sun, Zong-You YANG, Chih-Chun CHIANG, Yi-Fam Shiu +3 more | 2023-10-31 |
| 11782350 | Lithography system and method thereof | Chueh-Chi Kuo, Kuei-Lin Ho, Zong-You YANG, Cheng-Wei Sun, Wei Chen +3 more | 2023-10-10 |
| 11644759 | Droplet generator and method of servicing extreme ultraviolet radiation source apparatus | Yen-Hsun Chen, Ming-Hsun Tsai, Han-Lung Chang, Li-Jui Chen, Chia-Chen Chen | 2023-05-09 |