Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11830754 | Semiconductor processing method and apparatus | Shang-Shiuan Deng, Fan-Chi LIN, Li-Jui Chen, Heng-Hsin Liu | 2023-11-28 |
| 11803129 | Semiconductor processing tool and methods of operation | Shao-Hua Wang, Kueilin HO, Cheng-Wei Sun, Zong-You YANG, Chih-Chun CHIANG +3 more | 2023-10-31 |
| 11782350 | Lithography system and method thereof | Shao-Hua Wang, Kuei-Lin Ho, Zong-You YANG, Cheng-Wei Sun, Wei Chen +3 more | 2023-10-10 |
| 11703763 | Method of lithography process using reticle container with discharging device | Hsiao-Lun Chang, Tsung-Yen Lee, Tzung-Chi Fu, Li-Jui Chen, Po-Chung Cheng +1 more | 2023-07-18 |