Issued Patents 2023
Showing 1–25 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11852978 | EUV lithography system with 3D sensing and tunning modules | Tai-Yu Chen, Tzu-Jung Pan, Kuan-Hung Chen, Sheng-Kang Yu, Shang-Chieh Chien +1 more | 2023-12-26 |
| 11841625 | Device and method to remove debris from an extreme ultraviolet (EUV) lithography system | Chun-Han Lin, Chieh Hsieh, Sheng-Kang Yu, Shang-Chieh Chien, Li-Jui Chen | 2023-12-12 |
| 11830754 | Semiconductor processing method and apparatus | Shang-Shiuan Deng, Fan-Chi LIN, Chueh-Chi Kuo, Li-Jui Chen | 2023-11-28 |
| 11822256 | Semiconductor processing tool and methods of operation | Kai-Chieh Chang, Kai-Fa Ho, Li-Jui Chen | 2023-11-21 |
| 11809083 | EUV photolithography system fuel source and methods of operating the same | Cheng-Hao LAI, Ming-Hsun Tsai, Hsin-Feng Chen, Wei-Shin Cheng, Yu-Kuang SUN +6 more | 2023-11-07 |
| 11809087 | Semiconductor processing tool and methods of operation | Kai-Chieh Chang, Kai-Fa Ho, Li-Jui Chen | 2023-11-07 |
| 11803129 | Semiconductor processing tool and methods of operation | Shao-Hua Wang, Kueilin HO, Cheng-Wei Sun, Zong-You YANG, Chih-Chun CHIANG +3 more | 2023-10-31 |
| 11782350 | Lithography system and method thereof | Shao-Hua Wang, Chueh-Chi Kuo, Kuei-Lin Ho, Zong-You YANG, Cheng-Wei Sun +3 more | 2023-10-10 |
| 11768437 | System and method for performing extreme ultraviolet photolithography processes | Tai-Yu Chen, Sagar Deepak Khivsara, Kuo-An Liu, Chieh Hsieh, Shang-Chieh Chien +5 more | 2023-09-26 |
| 11747741 | Substrate stage, substrate processing system using the same, and method for processing substrate | Yu-Huan Chen, Yu-Chih Huang, Ya-An PENG, Shang-Chieh Chien, Li-Jui Chen | 2023-09-05 |
| 11747735 | EUV vessel perimeter flow auto adjustment | Che-Chang Hsu, Sheng-Kang Yu, Shang-Chieh Chien, Li-Jui Chen | 2023-09-05 |
| 11720035 | Mitigating long-term energy decay of laser devices | Chih-Ping YEN, Yen-Shuo Su, Jui-Pin Wu, Chun-Lin Chang, Han-Lung Chang | 2023-08-08 |
| 11693326 | System and method for dynamically controlling temperature of thermostatic reticles | Tzu-Jung Pan, Sheng-Kang Yu, Shang-Chieh Chien, Li-Jui Chen | 2023-07-04 |
| 11693324 | System and method for detecting debris in a photolithography system | Shih-Yu Tu, Chieh Hsieh, Shang-Chieh Chien, Li-Jui Chen | 2023-07-04 |
| 11694820 | Radiation source apparatus and method for using the same | Wei-Chung Tu, Sheng-Kang Yu, Shang-Chieh Chien, Li-Jui Chen | 2023-07-04 |
| 11681234 | Mask for attracting charged particles and method for using the same | Yen-An Chen, Li-Jui Chen, Tzung-Chi Fu, Han-Lung Chang | 2023-06-20 |
| 11675272 | Method and apparatus for mitigating contamination | Chih-Ping YEN, Yen-Shuo Su, Chieh Hsieh, Shang-Chieh Chien, Chun-Lin Chang +1 more | 2023-06-13 |
| 11662668 | Lithography contamination control | Chieh Hsieh, Tai-Yu Chen, Cho-Ying Lin, Shang-Chieh Chien, Li-Jui Chen | 2023-05-30 |
| 11650512 | Reticle cleaning device and method of use | Che-Chang Hsu, Sheng-Kang Yu, Shang-Chieh Chien, Li-Jui Chen | 2023-05-16 |
| 11647578 | Lithography thermal control | Tai-Yu Chen, Cho-Ying Lin, Sagar Deepak Khivsara, Hsiang Chen, Chieh Hsieh +5 more | 2023-05-09 |
| 11632849 | Method and apparatus for mitigating contamination | Chieh Hsieh, Tai-Yu Chen, Hung-Jung Hsu, Cho-Ying Lin, Shang-Chieh Chien +1 more | 2023-04-18 |
| 11605477 | EUV lithography apparatus | Cheng-Hung Tsai, Sheng-Kang Yu, Shang-Chieh Chien, Li-Jui Chen | 2023-03-14 |
| 11602037 | Apparatus and method for generating extreme ultraviolet radiation | Yu-Huan Chen, Yu-Chih Huang, Ming-Hsun Tsai, Shang-Chieh Chien | 2023-03-07 |
| 11576250 | Semiconductor processing tool and methods of operation | Cheng-Hao LAI, Ming-Hsun Tsai, Hsin-Feng Chen, Wei-Shin Cheng, Yu-Kuang SUN +3 more | 2023-02-07 |
| 11567415 | Inspection system for extreme ultraviolet (EUV) light source | Chiao-Hua Cheng, Shang-Chieh Chien, Li-Jui Chen, Sheng-Kang Yu | 2023-01-31 |