Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11821089 | Control system for plasma chamber having controllable valve | Ying Xiao, Chin-Hsiang Lin | 2023-11-21 |
| 11800626 | Shock wave visualization for extreme ultraviolet plasma optimization | Jen-Hao Yeh, Jhan-Hong YEH, Ting-Ya CHENG, Henry Yee Shian Tong, Chun-Lin Chang +3 more | 2023-10-24 |
| 11720035 | Mitigating long-term energy decay of laser devices | Chih-Ping YEN, Jui-Pin Wu, Chun-Lin Chang, Han-Lung Chang, Heng-Hsin Liu | 2023-08-08 |
| 11675272 | Method and apparatus for mitigating contamination | Chih-Ping YEN, Chieh Hsieh, Shang-Chieh Chien, Chun-Lin Chang, Li-Jui Chen +1 more | 2023-06-13 |