Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11800626 | Shock wave visualization for extreme ultraviolet plasma optimization | Yen-Shuo Su, Jhan-Hong YEH, Ting-Ya CHENG, Henry Yee Shian Tong, Chun-Lin Chang +3 more | 2023-10-24 |
| 11737200 | Residual gain monitoring and reduction for EUV drive laser | Chun-Lin Chang, Han-Lung Chang, Tzung-Chi Fu, Bo-Tsun Liu, Li-Jui Chen +1 more | 2023-08-22 |
| 11723141 | EUV radiation generation methods and systems | Chun-Lin Chang, Tzung-Chi Fu, Bo-Tsun Liu, Li-Jui Chen, Po-Chung Cheng | 2023-08-08 |