Issued Patents 2023
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11800626 | Shock wave visualization for extreme ultraviolet plasma optimization | Yen-Shuo Su, Jen-Hao Yeh, Jhan-Hong YEH, Ting-Ya CHENG, Henry Yee Shian Tong +3 more | 2023-10-24 |
| 11737200 | Residual gain monitoring and reduction for EUV drive laser | Jen-Hao Yeh, Han-Lung Chang, Tzung-Chi Fu, Bo-Tsun Liu, Li-Jui Chen +1 more | 2023-08-22 |
| 11720035 | Mitigating long-term energy decay of laser devices | Chih-Ping YEN, Yen-Shuo Su, Jui-Pin Wu, Han-Lung Chang, Heng-Hsin Liu | 2023-08-08 |
| 11723141 | EUV radiation generation methods and systems | Jen-Hao Yeh, Tzung-Chi Fu, Bo-Tsun Liu, Li-Jui Chen, Po-Chung Cheng | 2023-08-08 |
| 11675272 | Method and apparatus for mitigating contamination | Chih-Ping YEN, Yen-Shuo Su, Chieh Hsieh, Shang-Chieh Chien, Li-Jui Chen +1 more | 2023-06-13 |
| 11608566 | High resistance virtual anode for electroplating cell | Po-Wei Wang | 2023-03-21 |
| 11588293 | Methods and systems for aligning master oscillator power amplifier systems | Henry Tong Yee-Shian, Alan Tu, Han-Lung Chang, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2023-02-21 |