Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11800626 | Shock wave visualization for extreme ultraviolet plasma optimization | Yen-Shuo Su, Jen-Hao Yeh, Ting-Ya CHENG, Henry Yee Shian Tong, Chun-Lin Chang +3 more | 2023-10-24 |
| 11698591 | System and method of discharging an EUV mask | Yi-Zhen Chen, Yen-Hsun Chen, Tzung-Chi Fu, Han-Lung Chang, Li-Jui Chen | 2023-07-11 |
| 11687011 | Reticle carrier and associated methods | Yen-Hsun Chen, Yi-Zhen Chen, Han-Lung Chang, Tzung-Chi Fu, Li-Jui Chen | 2023-06-27 |