Issued Patents 2023
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11800626 | Shock wave visualization for extreme ultraviolet plasma optimization | Yen-Shuo Su, Jen-Hao Yeh, Jhan-Hong YEH, Ting-Ya CHENG, Henry Yee Shian Tong +3 more | 2023-10-24 |
| 11792909 | Apparatus and method for generating extreme ultraviolet radiation | Wei-Chih Lai, Chi-Ming Yang, Shang-Chieh Chien, Bo-Tsun Liu, Li-Jui Chen +1 more | 2023-10-17 |
| 11737200 | Residual gain monitoring and reduction for EUV drive laser | Chun-Lin Chang, Jen-Hao Yeh, Tzung-Chi Fu, Bo-Tsun Liu, Li-Jui Chen +1 more | 2023-08-22 |
| 11720035 | Mitigating long-term energy decay of laser devices | Chih-Ping YEN, Yen-Shuo Su, Jui-Pin Wu, Chun-Lin Chang, Heng-Hsin Liu | 2023-08-08 |
| 11698591 | System and method of discharging an EUV mask | Yi-Zhen Chen, Yen-Hsun Chen, Jhan-Hong YEH, Tzung-Chi Fu, Li-Jui Chen | 2023-07-11 |
| 11687011 | Reticle carrier and associated methods | Yen-Hsun Chen, Yi-Zhen Chen, Jhan-Hong YEH, Tzung-Chi Fu, Li-Jui Chen | 2023-06-27 |
| 11681234 | Mask for attracting charged particles and method for using the same | Yen-An Chen, Li-Jui Chen, Heng-Hsin Liu, Tzung-Chi Fu | 2023-06-20 |
| 11644759 | Droplet generator and method of servicing extreme ultraviolet radiation source apparatus | Yen-Hsun Chen, Ming-Hsun Tsai, Shao-Hua Wang, Li-Jui Chen, Chia-Chen Chen | 2023-05-09 |
| 11617255 | Droplet generator and method of servicing extreme ultraviolet imaging tool | Wei-Chih Lai, Bo-Tsun Liu, Li-Jui Chen, Po-Chung Cheng | 2023-03-28 |
| 11599030 | Droplet catcher, droplet catcher system of EUV lithography apparatus, and maintenance method of the EUV lithography apparatus | Shih-Yu Tu, Po-Chung Cheng, Hsiao-Lun Chang, Li-Jui Chen | 2023-03-07 |
| 11592754 | Advanced load port for photolithography mask inspection tool | Tung-Jung Chang, Jen-Yang Chung | 2023-02-28 |
| 11588293 | Methods and systems for aligning master oscillator power amplifier systems | Chun-Lin Chang, Henry Tong Yee-Shian, Alan Tu, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2023-02-21 |