Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11792909 | Apparatus and method for generating extreme ultraviolet radiation | Han-Lung Chang, Chi-Ming Yang, Shang-Chieh Chien, Bo-Tsun Liu, Li-Jui Chen +1 more | 2023-10-17 |
| 11617255 | Droplet generator and method of servicing extreme ultraviolet imaging tool | Han-Lung Chang, Bo-Tsun Liu, Li-Jui Chen, Po-Chung Cheng | 2023-03-28 |