Issued Patents 2023
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11829082 | Radiation source for lithography process | Shang-Ying WU, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2023-11-28 |
| 11792909 | Apparatus and method for generating extreme ultraviolet radiation | Wei-Chih Lai, Han-Lung Chang, Chi-Ming Yang, Shang-Chieh Chien, Li-Jui Chen +1 more | 2023-10-17 |
| 11774844 | Extreme ultraviolet mask and method of manufacturing the same | Chih-Tsung Shih, Tsung-Chih Chien, Shih-Chi Fu, Chi-Hua FU, Kuotang CHENG +1 more | 2023-10-03 |
| 11737200 | Residual gain monitoring and reduction for EUV drive laser | Chun-Lin Chang, Jen-Hao Yeh, Han-Lung Chang, Tzung-Chi Fu, Li-Jui Chen +1 more | 2023-08-22 |
| 11720025 | Extreme ultraviolet lithography method, extreme ultraviolet mask and formation method thereof | Chih-Tsung Shih, Yu-Hsun Wu, Tsung Chuan Lee | 2023-08-08 |
| 11723141 | EUV radiation generation methods and systems | Chun-Lin Chang, Jen-Hao Yeh, Tzung-Chi Fu, Li-Jui Chen, Po-Chung Cheng | 2023-08-08 |
| 11703769 | Light source, EUV lithography system, and method for performing circuit layout patterning process | Chi-Ming Yang, Ssu-Yu Chen, Shang-Chieh Chien, Chieh Hsieh, Tzung-Chi Fu +2 more | 2023-07-18 |
| 11703762 | Method of reducing undesired light influence in extreme ultraviolet exposure | Chih-Tsung Shih, Chen-Ming Wang, Yahru Cheng, Tsung Chuan Lee | 2023-07-18 |
| 11630393 | Apparatus and method for generating extreme ultraviolet radiation | Chieh Hsieh, Kuan-Hung Chen, Chun-Chia Hsu, Shang-Chieh Chien, Li-Jui Chen +1 more | 2023-04-18 |
| 11617255 | Droplet generator and method of servicing extreme ultraviolet imaging tool | Wei-Chih Lai, Han-Lung Chang, Li-Jui Chen, Po-Chung Cheng | 2023-03-28 |
| 11588293 | Methods and systems for aligning master oscillator power amplifier systems | Chun-Lin Chang, Henry Tong Yee-Shian, Alan Tu, Han-Lung Chang, Tzung-Chi Fu +2 more | 2023-02-21 |